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This content will become publicly available on March 5, 2019

Title: Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality

Authors:
ORCiD logo [1] ;  [1] ;  [1] ;  [2] ;  [1]
  1. Department of Materials Science and Engineering and the Institute for Research in Electronics and Applied Physics, University of Maryland, College Park Maryland
  2. IBM TJ Watson Research Center, Yorktown Heights New York
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Processes and Polymers
Additional Journal Information:
Journal Name: Plasma Processes and Polymers Journal Volume: 15 Journal Issue: 5; Journal ID: ISSN 1612-8850
Publisher:
Wiley Blackwell (John Wiley & Sons)
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
Country of Publication:
Country unknown/Code not available
Language:
English
OSTI Identifier:
1423710

Knoll, Andrew J., Luan, Pingshan, Pranda, Adam, Bruce, Robert L., and Oehrlein, Gottlieb S.. Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality. Country unknown/Code not available: N. p., Web. doi:10.1002/ppap.201700217.
Knoll, Andrew J., Luan, Pingshan, Pranda, Adam, Bruce, Robert L., & Oehrlein, Gottlieb S.. Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality. Country unknown/Code not available. doi:10.1002/ppap.201700217.
Knoll, Andrew J., Luan, Pingshan, Pranda, Adam, Bruce, Robert L., and Oehrlein, Gottlieb S.. 2018. "Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality". Country unknown/Code not available. doi:10.1002/ppap.201700217.
@article{osti_1423710,
title = {Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality},
author = {Knoll, Andrew J. and Luan, Pingshan and Pranda, Adam and Bruce, Robert L. and Oehrlein, Gottlieb S.},
abstractNote = {},
doi = {10.1002/ppap.201700217},
journal = {Plasma Processes and Polymers},
number = 5,
volume = 15,
place = {Country unknown/Code not available},
year = {2018},
month = {3}
}

Works referenced in this record:

Electrohydraulic Discharge and Nonthermal Plasma for Water Treatment
journal, February 2006
  • Locke, B. R.; Sato, M.; Sunka, P.
  • Industrial & Engineering Chemistry Research, Vol. 45, Issue 3, p. 882-905
  • DOI: 10.1021/ie050981u