Stressor-layer-induced elastic strain sharing in SrTiO3 complex oxide sheets

Tilka, J. A.; Park, J.; Ahn, Y.; Pateras, A.; Cai, Z.; Evans, P. G.

doi:10.1063/1.5019920

Title: Stressor-layer-induced elastic strain sharing in SrTiO₃ complex oxide sheets

Journal Article · 26 February 2018 · Applied Physics Letters

DOI: https://doi.org/10.1063/1.5019920 · OSTI ID:1423428

Tilka, J. A. ^[1]; Park, J. ^[2]; Ahn, Y. ^[2];

^[2]; Cai, Z. ^[3];

^[2]

Univ. of Wisconsin-Madison, Madison, WI (United States). Dept. of Materials Science and Engineering; University of Wisconsin-Madison
Univ. of Wisconsin-Madison, Madison, WI (United States). Dept. of Materials Science and Engineering
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

A precisely selected elastic strain can be introduced in submicron-thick single-crystal SrTiO₃ sheets using a silicon nitride stressor layer. A conformal stressor layer deposited using plasma-enhanced chemical vapor deposition produces an elastic strain in the sheet consistent with the magnitude of the nitride residual stress. Synchrotron x-ray nanodiffraction reveals that the strain introduced in the SrTiO₃ sheets is on the order of 10^-4, matching the predictions of an elastic model. Using this approach to elastic strain sharing in complex oxides allows the strain to be selected within a wide and continuous range of values, an effect not achievable in heteroepitaxy on rigid substrates.

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Research Organization:: Univ. of Wisconsin-Madison, Madison, WI (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; National Science Foundation (NSF); University of Wisconsin

Grant/Contract Number:: FG02-04ER46147; AC02-06CH11357

OSTI ID:: 1423428

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 9 Vol. 112; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Title: Stressor-layer-induced elastic strain sharing in SrTiO3 complex oxide sheets

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Title: Stressor-layer-induced elastic strain sharing in SrTiO₃ complex oxide sheets