Coefficient of thermal expansion and biaxial Young's modulus in Si-rich silicon nitride thin films
Journal Article
·
· Journal of Vacuum Science and Technology A
- Sandia National Laboratories, P. O Box 5800, MS1084, Albuquerque, New Mexico 87185
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 1423386
- Journal Information:
- Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Vol. 36 Journal Issue: 2; ISSN 0734-2101
- Publisher:
- American Vacuum SocietyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
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