Fabrication of phonon-based metamaterial structures using focused ion beam patterning

Bassim, Nabil D.; Giles, Alexander J.; Ocola, Leonidas E.; Caldwell, Joshua D.

doi:10.1063/1.5008507

Title: Fabrication of phonon-based metamaterial structures using focused ion beam patterning

Authors:

Bassim, Nabil D. ^[1]; Giles, Alexander J. ^[2]; Ocola, Leonidas E. ^[3]; Caldwell, Joshua D. ^[4]

U.S. Naval Research Laboratory, Washington, DC 20375, USA, Department of Materials Science and Engineering, McMaster University, Hamilton, Ontario L8S 4L8, Canada
U.S. Naval Research Laboratory, Washington, DC 20375, USA
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA
U.S. Naval Research Laboratory, Washington, DC 20375, USA, Department of Mechanical Engineering, Vanderbilt University, Nashville, Tennessee 37212, USA

Publication Date:: Mon Feb 26 00:00:00 EST 2018

Sponsoring Org.:: USDOE

OSTI Identifier:: 1422860

Grant/Contract Number:: AC02-06CH11357

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Applied Physics Letters

Additional Journal Information:: Journal Name: Applied Physics Letters Journal Volume: 112 Journal Issue: 9; Journal ID: ISSN 0003-6951

Publisher:: American Institute of Physics

Country of Publication:: United States

Language:: English

Citation Formats


                    Bassim, Nabil D., Giles, Alexander J., Ocola, Leonidas E., and Caldwell, Joshua D. Fabrication of phonon-based metamaterial structures using focused ion beam patterning.  United States: N. p., 2018. 
Web.  doi:10.1063/1.5008507.

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                    Bassim, Nabil D., Giles, Alexander J., Ocola, Leonidas E., & Caldwell, Joshua D. Fabrication of phonon-based metamaterial structures using focused ion beam patterning.  United States.  https://doi.org/10.1063/1.5008507

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                    Bassim, Nabil D., Giles, Alexander J., Ocola, Leonidas E., and Caldwell, Joshua D. Mon .  
"Fabrication of phonon-based metamaterial structures using focused ion beam patterning".  United States.  https://doi.org/10.1063/1.5008507.

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@article{osti_1422860,

  title        = {Fabrication of phonon-based metamaterial structures using focused ion beam patterning},

  author       = {Bassim, Nabil D. and Giles, Alexander J. and Ocola, Leonidas E. and Caldwell, Joshua D.},

  abstractNote = {},

  doi          = {10.1063/1.5008507},

  journal      = {Applied Physics Letters},

  number       = 9,

  volume       = 112,

  place        = {United States},

  year         = {Mon Feb 26 00:00:00 EST 2018},

  month        = {Mon Feb 26 00:00:00 EST 2018}

}

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Title: Fabrication of phonon-based metamaterial structures using focused ion beam patterning

Citation Formats

Optical Properties of Single Infrared Resonant Circular Microcavities for Surface Phonon Polaritons journal, October 2013

Highly confined low-loss plasmons in graphene–boron nitride heterostructures journal, December 2014

Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface journal, May 2007

Low-loss, infrared and terahertz nanophotonics using surface phonon polaritons journal, January 2015

Spectral Tuning of Localized Surface Phonon Polariton Resonators for Low-Loss Mid-IR Applications journal, July 2014

Iodine enhanced focused-ion-beam etching of silicon for photonic applications journal, November 2007

Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling journal, February 2011

High-resolution direct-write patterning using focused ion beams journal, April 2014

Recent advances in focused ion beam technology and applications journal, April 2014

Curved gratings as an integrated photon fluence monitor in x-ray transmission scattering experiments journal, January 2016

Active tuning of surface phonon polariton resonances via carrier photoinjection journal, December 2017

Mid-infrared nanophotonics journal, March 2015

Ultralow-loss polaritons in isotopically pure boron nitride journal, December 2017

Optical excitation of surface phonon polaritons in silicon carbide by a hole array fabricated by a focused ion beam journal, October 2007

Low-Loss, Extreme Subdiffraction Photon Confinement via Silicon Carbide Localized Surface Phonon Polariton Resonators journal, July 2013

Sub-diffractional volume-confined polaritons in the natural hyperbolic material hexagonal boron nitride journal, October 2014

Advances in ion beam micromachining for complex 3D microfluidics journal, November 2013

Tunable Phonon Polaritons in Atomically Thin van der Waals Crystals of Boron Nitride journal, March 2014

Coherent emission of light by thermal sources journal, March 2002

Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry journal, October 1999

Atomic-scale photonic hybrids for mid-infrared and terahertz nanophotonics journal, January 2016

Mid-infrared metamaterial based on perforated SiC membrane: engineering optical response using surface phonon polaritons journal, June 2007

Monolithic Integration of Continuously Tunable Plasmonic Nanostructures journal, September 2011

Three-dimensional microfluidic mixers using ion beam lithography and micromachining journal, November 2010

Phonon-Polaritonic Bowtie Nanoantennas: Controlling Infrared Thermal Radiation at the Nanoscale journal, June 2017

Graphene on hexagonal boron nitride as a tunable hyperbolic metamaterial journal, June 2015

Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces journal, August 2006

Extraordinary optical transmission through sub-wavelength hole arrays journal, February 1998

Optical antenna thermal emitters journal, October 2009

Phonon-enhanced light–matter interaction at the nanometre scale journal, July 2002

Reconstructing focused ion beam current density profile by iterative simulation methodology journal, November 2016

One-dimensional surface phonon polaritons in boron nitride nanotubes journal, August 2014

Dielectric Metamaterials Based on Electric and Magnetic Resonances of Silicon Carbide Particles journal, September 2007

Focused ion beam milling of diamond: Effects of H[sub 2]O on yield, surface morphology and microstructure journal, January 2003

Optical properties of sub-wavelength hole arrays in SiC membranes journal, August 2007

Subwavelength-scale tailoring of surface phonon polaritons by focused ion-beam implantation journal, August 2004

Optical Properties of Single Infrared Resonant Circular Microcavities for Surface Phonon Polaritons
journal, October 2013

Highly confined low-loss plasmons in graphene–boron nitride heterostructures
journal, December 2014

Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface
journal, May 2007

Low-loss, infrared and terahertz nanophotonics using surface phonon polaritons
journal, January 2015

Spectral Tuning of Localized Surface Phonon Polariton Resonators for Low-Loss Mid-IR Applications
journal, July 2014

Iodine enhanced focused-ion-beam etching of silicon for photonic applications
journal, November 2007

Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling
journal, February 2011

High-resolution direct-write patterning using focused ion beams
journal, April 2014

Recent advances in focused ion beam technology and applications
journal, April 2014

Curved gratings as an integrated photon fluence monitor in x-ray transmission scattering experiments
journal, January 2016

Active tuning of surface phonon polariton resonances via carrier photoinjection
journal, December 2017

Mid-infrared nanophotonics
journal, March 2015

Ultralow-loss polaritons in isotopically pure boron nitride
journal, December 2017

Optical excitation of surface phonon polaritons in silicon carbide by a hole array fabricated by a focused ion beam
journal, October 2007

Low-Loss, Extreme Subdiffraction Photon Confinement via Silicon Carbide Localized Surface Phonon Polariton Resonators
journal, July 2013

Sub-diffractional volume-confined polaritons in the natural hyperbolic material hexagonal boron nitride
journal, October 2014

Advances in ion beam micromachining for complex 3D microfluidics
journal, November 2013

Tunable Phonon Polaritons in Atomically Thin van der Waals Crystals of Boron Nitride
journal, March 2014

Coherent emission of light by thermal sources
journal, March 2002

Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry
journal, October 1999

Atomic-scale photonic hybrids for mid-infrared and terahertz nanophotonics
journal, January 2016

Mid-infrared metamaterial based on perforated SiC membrane: engineering optical response using surface phonon polaritons
journal, June 2007

Monolithic Integration of Continuously Tunable Plasmonic Nanostructures
journal, September 2011

Three-dimensional microfluidic mixers using ion beam lithography and micromachining
journal, November 2010

Phonon-Polaritonic Bowtie Nanoantennas: Controlling Infrared Thermal Radiation at the Nanoscale
journal, June 2017

Graphene on hexagonal boron nitride as a tunable hyperbolic metamaterial
journal, June 2015

Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces
journal, August 2006

Extraordinary optical transmission through sub-wavelength hole arrays
journal, February 1998

Optical antenna thermal emitters
journal, October 2009

Phonon-enhanced light–matter interaction at the nanometre scale
journal, July 2002

Reconstructing focused ion beam current density profile by iterative simulation methodology
journal, November 2016

One-dimensional surface phonon polaritons in boron nitride nanotubes
journal, August 2014

Dielectric Metamaterials Based on Electric and Magnetic Resonances of Silicon Carbide Particles
journal, September 2007

Focused ion beam milling of diamond: Effects of H[sub 2]O on yield, surface morphology and microstructure
journal, January 2003

Optical properties of sub-wavelength hole arrays in SiC membranes
journal, August 2007

Subwavelength-scale tailoring of surface phonon polaritons by focused ion-beam implantation
journal, August 2004