skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Fabrication of phonon-based metamaterial structures using focused ion beam patterning

Authors:
 [1];  [2];  [3];  [4]
  1. U.S. Naval Research Laboratory, Washington, DC 20375, USA, Department of Materials Science and Engineering, McMaster University, Hamilton, Ontario L8S 4L8, Canada
  2. U.S. Naval Research Laboratory, Washington, DC 20375, USA
  3. Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA
  4. U.S. Naval Research Laboratory, Washington, DC 20375, USA, Department of Mechanical Engineering, Vanderbilt University, Nashville, Tennessee 37212, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1422860
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 112 Journal Issue: 9; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Bassim, Nabil D., Giles, Alexander J., Ocola, Leonidas E., and Caldwell, Joshua D. Fabrication of phonon-based metamaterial structures using focused ion beam patterning. United States: N. p., 2018. Web. doi:10.1063/1.5008507.
Bassim, Nabil D., Giles, Alexander J., Ocola, Leonidas E., & Caldwell, Joshua D. Fabrication of phonon-based metamaterial structures using focused ion beam patterning. United States. doi:10.1063/1.5008507.
Bassim, Nabil D., Giles, Alexander J., Ocola, Leonidas E., and Caldwell, Joshua D. Mon . "Fabrication of phonon-based metamaterial structures using focused ion beam patterning". United States. doi:10.1063/1.5008507.
@article{osti_1422860,
title = {Fabrication of phonon-based metamaterial structures using focused ion beam patterning},
author = {Bassim, Nabil D. and Giles, Alexander J. and Ocola, Leonidas E. and Caldwell, Joshua D.},
abstractNote = {},
doi = {10.1063/1.5008507},
journal = {Applied Physics Letters},
number = 9,
volume = 112,
place = {United States},
year = {2018},
month = {2}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1063/1.5008507

Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Optical Properties of Single Infrared Resonant Circular Microcavities for Surface Phonon Polaritons
journal, October 2013

  • Wang, Tao; Li, Peining; Hauer, Benedikt
  • Nano Letters, Vol. 13, Issue 11
  • DOI: 10.1021/nl4020342

Highly confined low-loss plasmons in graphene–boron nitride heterostructures
journal, December 2014

  • Woessner, Achim; Lundeberg, Mark B.; Gao, Yuanda
  • Nature Materials, Vol. 14, Issue 4
  • DOI: 10.1038/nmat4169

Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface
journal, May 2007

  • MoberlyChan, Warren J.; Adams, David P.; Aziz, Michael J.
  • MRS Bulletin, Vol. 32, Issue 5
  • DOI: 10.1557/mrs2007.66

Low-loss, infrared and terahertz nanophotonics using surface phonon polaritons
journal, January 2015


Spectral Tuning of Localized Surface Phonon Polariton Resonators for Low-Loss Mid-IR Applications
journal, July 2014

  • Chen, Yiguo; Francescato, Yan; Caldwell, Joshua D.
  • ACS Photonics, Vol. 1, Issue 8
  • DOI: 10.1021/ph500143u

Iodine enhanced focused-ion-beam etching of silicon for photonic applications
journal, November 2007

  • Schrauwen, Jonathan; Van Thourhout, Dries; Baets, Roel
  • Journal of Applied Physics, Vol. 102, Issue 10
  • DOI: 10.1063/1.2815664

Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling
journal, February 2011

  • Menard, Laurent D.; Ramsey, J. Michael
  • Nano Letters, Vol. 11, Issue 2
  • DOI: 10.1021/nl103369g

High-resolution direct-write patterning using focused ion beams
journal, April 2014

  • Ocola, Leonidas E.; Rue, Chad; Maas, Diederik
  • MRS Bulletin, Vol. 39, Issue 4
  • DOI: 10.1557/mrs.2014.56

Recent advances in focused ion beam technology and applications
journal, April 2014

  • Bassim, Nabil; Scott, Keana; Giannuzzi, Lucille A.
  • MRS Bulletin, Vol. 39, Issue 4
  • DOI: 10.1557/mrs.2014.52

Curved gratings as an integrated photon fluence monitor in x-ray transmission scattering experiments
journal, January 2016

  • Schneider, Michael; Günther, Christian Michael; von Korff Schmising, Clemens
  • Optics Express, Vol. 24, Issue 12
  • DOI: 10.1364/OE.24.013091

Active tuning of surface phonon polariton resonances via carrier photoinjection
journal, December 2017

  • Dunkelberger, Adam D.; Ellis, Chase T.; Ratchford, Daniel C.
  • Nature Photonics, Vol. 12, Issue 1
  • DOI: 10.1038/s41566-017-0069-0

Mid-infrared nanophotonics
journal, March 2015

  • Caldwell, Joshua D.; Novoselov, Kostya S.
  • Nature Materials, Vol. 14, Issue 4
  • DOI: 10.1038/nmat4252

Ultralow-loss polaritons in isotopically pure boron nitride
journal, December 2017

  • Giles, Alexander J.; Dai, Siyuan; Vurgaftman, Igor
  • Nature Materials, Vol. 17, Issue 2
  • DOI: 10.1038/nmat5047

Optical excitation of surface phonon polaritons in silicon carbide by a hole array fabricated by a focused ion beam
journal, October 2007


Low-Loss, Extreme Subdiffraction Photon Confinement via Silicon Carbide Localized Surface Phonon Polariton Resonators
journal, July 2013

  • Caldwell, Joshua D.; Glembocki, Orest J.; Francescato, Yan
  • Nano Letters, Vol. 13, Issue 8
  • DOI: 10.1021/nl401590g

Sub-diffractional volume-confined polaritons in the natural hyperbolic material hexagonal boron nitride
journal, October 2014

  • Caldwell, Joshua D.; Kretinin, Andrey V.; Chen, Yiguo
  • Nature Communications, Vol. 5, Issue 1
  • DOI: 10.1038/ncomms6221

Advances in ion beam micromachining for complex 3D microfluidics
journal, November 2013

  • Ocola, Leonidas E.; Palacios, Edgar
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 6
  • DOI: 10.1116/1.4819302

Tunable Phonon Polaritons in Atomically Thin van der Waals Crystals of Boron Nitride
journal, March 2014


Coherent emission of light by thermal sources
journal, March 2002

  • Greffet, Jean-Jacques; Carminati, Rémi; Joulain, Karl
  • Nature, Vol. 416, Issue 6876, p. 61-64
  • DOI: 10.1038/416061a

Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry
journal, October 1999


Atomic-scale photonic hybrids for mid-infrared and terahertz nanophotonics
journal, January 2016

  • Caldwell, Joshua D.; Vurgaftman, Igor; Tischler, Joseph G.
  • Nature Nanotechnology, Vol. 11, Issue 1
  • DOI: 10.1038/nnano.2015.305

Mid-infrared metamaterial based on perforated SiC membrane: engineering optical response using surface phonon polaritons
journal, June 2007


Monolithic Integration of Continuously Tunable Plasmonic Nanostructures
journal, September 2011

  • Lindquist, Nathan C.; Johnson, Timothy W.; Norris, David J.
  • Nano Letters, Vol. 11, Issue 9, p. 3526-3530
  • DOI: 10.1021/nl2005737

Three-dimensional microfluidic mixers using ion beam lithography and micromachining
journal, November 2010

  • Palacios, E.; Ocola, L. E.; Joshi-Imre, A.
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6, p. C6I1-C6I6
  • DOI: 10.1116/1.3505128

Phonon-Polaritonic Bowtie Nanoantennas: Controlling Infrared Thermal Radiation at the Nanoscale
journal, June 2017


Graphene on hexagonal boron nitride as a tunable hyperbolic metamaterial
journal, June 2015


Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces
journal, August 2006


Extraordinary optical transmission through sub-wavelength hole arrays
journal, February 1998

  • Ebbesen, T. W.; Lezec, H. J.; Ghaemi, H. F.
  • Nature, Vol. 391, Issue 6668, p. 667-669
  • DOI: 10.1038/35570

Optical antenna thermal emitters
journal, October 2009

  • Schuller, Jon A.; Taubner, Thomas; Brongersma, Mark L.
  • Nature Photonics, Vol. 3, Issue 11
  • DOI: 10.1038/nphoton.2009.188

Phonon-enhanced light–matter interaction at the nanometre scale
journal, July 2002

  • Hillenbrand, R.; Taubner, T.; Keilmann, F.
  • Nature, Vol. 418, Issue 6894
  • DOI: 10.1038/nature00899

Reconstructing focused ion beam current density profile by iterative simulation methodology
journal, November 2016

  • Chang, Eddie; Toula, Kevin; Ray, Valery
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 34, Issue 6
  • DOI: 10.1116/1.4968537

One-dimensional surface phonon polaritons in boron nitride nanotubes
journal, August 2014

  • Xu, Xiaoji G.; Ghamsari, Behnood G.; Jiang, Jian-Hua
  • Nature Communications, Vol. 5, Issue 1
  • DOI: 10.1038/ncomms5782

Dielectric Metamaterials Based on Electric and Magnetic Resonances of Silicon Carbide Particles
journal, September 2007


Focused ion beam milling of diamond: Effects of H[sub 2]O on yield, surface morphology and microstructure
journal, January 2003

  • Adams, D. P.; Vasile, M. J.; Mayer, T. M.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
  • DOI: 10.1116/1.1619421

Optical properties of sub-wavelength hole arrays in SiC membranes
journal, August 2007

  • Urzhumov, Y. A.; Korobkin, D.; Neuner III, B.
  • Journal of Optics A: Pure and Applied Optics, Vol. 9, Issue 9
  • DOI: 10.1088/1464-4258/9/9/S07

Subwavelength-scale tailoring of surface phonon polaritons by focused ion-beam implantation
journal, August 2004

  • Ocelic, N.; Hillenbrand, R.
  • Nature Materials, Vol. 3, Issue 9
  • DOI: 10.1038/nmat1194