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Title: In situ characterization of the deposition of anatase TiO 2 on rutile TiO 2 (110)

Journal Article · · Journal of Vacuum Science and Technology A
DOI: https://doi.org/10.1116/1.5005533 · OSTI ID:1422846
; ;  [1]; ; ; ;  [2]; ; ;
  1. MAX IV Laboratory, Lund University, Box 118, 22100 Lund, Sweden
  2. Chemical Sciences Division and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720

Sponsoring Organization:
USDOE
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1422846
Journal Information:
Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Vol. 36 Journal Issue: 2; ISSN 0734-2101
Publisher:
American Vacuum SocietyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 10 works
Citation information provided by
Web of Science

References (40)

Observation of a two-dimensional liquid of Fröhlich polarons at the bare SrTiO3 surface journal October 2015
LEED studies of surface imperfections journal July 1982
Photoelectron spectroscopy under ambient pressure and temperature conditions
  • Frank Ogletree, D.; Bluhm, Hendrik; Hebenstreit, Eleonore D.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 601, Issue 1-2 https://doi.org/10.1016/j.nima.2008.12.155
journal March 2009
Selective Deposition of Dielectrics: Limits and Advantages of Alkanethiol Blocking Agents on Metal–Dielectric Patterns journal November 2016
Near Ambient Pressure X-ray Photoelectron Spectroscopy Study of the Atomic Layer Deposition of TiO 2 on RuO 2 (110) journal December 2015
Reaction Mechanism Studies on Titanium Isopropoxide–Water Atomic Layer Deposition Process journal January 2002
Electronic structure of titania aerogels from soft x-ray absorption spectroscopy journal June 2004
Atomic Layer Deposition of p-Type Epitaxial Thin Films of Undoped and N-Doped Anatase TiO 2 journal March 2016
Microscopic structure of the SiO 2 /Si interface journal September 1988
Atomic Layer Deposition (ALD) of ZrO2in Ultrahigh Vacuum (UHV) journal April 2013
Does Chemistry Really Matter in the Chemical Vapor Deposition of Titanium Dioxide? Precursor and Kinetic Effects on the Microstructure of Polycrystalline Films journal June 1999
Real-Time Study of CVD Growth of Silicon Oxide on Rutile TiO2(110) Using Tetraethyl Orthosilicate journal August 2015
Shape-selective sieving layers on an oxide catalyst surface journal October 2012
The Nature of Water Nucleation Sites on TiO 2 (110) Surfaces Revealed by Ambient Pressure X-ray Photoelectron Spectroscopy journal June 2007
Growth of epitaxial oxides on silicon using atomic layer deposition: Crystallization and annealing of TiO2 on SrTiO3-buffered Si(001)
  • McDaniel, Martin D.; Posadas, Agham; Ngo, Thong Q.
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 4 https://doi.org/10.1116/1.4734311
journal July 2012
Solid phase epitaxial regrowth of (001) anatase titanium dioxide journal March 2016
Homo-epitaxial growth of rutile TiO2 film on step and terrace structured substrate journal November 2004
Probing the influence from residual Ti interstitials on water adsorption on TiO2(110) journal November 2012
TiO2 chemical vapor deposition on Si(111) in ultrahigh vacuum: Transition from interfacial phase to crystalline phase in the reaction limited regime journal July 2011
Growth and characterization of epitaxial anatase TiO2(001) on SrTiO3-buffered Si(001) using atomic layer deposition journal August 2012
In-situ X-ray Photoemission Spectroscopy Study of Atomic Layer Deposition of TiO2 on Silicon Substrate journal February 2012
Templated Homoepitaxial Growth with Atomic Layer Deposition of Single-Crystal Anatase (101) and Rutile (110) TiO 2 journal June 2014
Pulse laser deposition of epitaxial TiO 2 thin films for high-performance ultraviolet photodetectors journal November 2015
Growth of epitaxial anatase (001) and (101) films journal October 2001
Low Temperature Chemical Vapor Deposition Using Atomic Layer Deposition Chemistry journal January 2015
Surface Kinetics of Titanium Isopropoxide in High Vacuum Chemical Vapor Deposition journal October 2015
A versatile instrument for ambient pressure x-ray photoelectron spectroscopy: The Lund cell approach journal April 2016
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends journal January 2013
Soft X-ray microscopy and spectroscopy at the molecular environmental science beamline at the Advanced Light Source journal February 2006
Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers journal September 2008
Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
  • Kraus, Theodore J.; Nepomnyashchii, Alexander B.; Parkinson, B. A.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1 https://doi.org/10.1116/1.4902328
journal January 2015
Nanoscale oxygen nonstoichiometry in epitaxial TiO2 films grown by pulsed laser deposition journal November 2011
The surface science of titanium dioxide journal January 2003
Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process journal July 2000
Epitaxial TiO2/SnO2 core–shell heterostructure by atomic layer deposition journal January 2012
Alternative Low-Pressure Surface Chemistry of Titanium Tetraisopropoxide on Oxidized Molybdenum journal October 2014
Titanium Dioxide Nanomaterials: Self-Structural Modifications journal May 2014
Sub-5 nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template journal May 2016
Transformation of the Crystalline Structure of an ALD TiO[sub 2] Film on a Ru Electrode by O[sub 3] Pretreatment journal January 2006
Atomic Layer Deposition of TiO 2 on Mesoporous nanoITO: Conductive Core–Shell Photoanodes for Dye-Sensitized Solar Cells journal May 2014