The Structure of Liquid and Amorphous Hafnia
Abstract
Understanding the atomic structure of amorphous solids is important in predicting and tuning their macroscopic behavior. Here, we use a combination of high-energy X-ray diffraction, neutron diffraction, and molecular dynamics simulations to benchmark the atomic interactions in the high temperature stable liquid and low-density amorphous solid states of hafnia. The diffraction results reveal an average Hf–O coordination number of ~7 exists in both the liquid and amorphous nanoparticle forms studied. The measured pair distribution functions are compared to those generated from several simulation models in the literature. We have also performed ab initio and classical molecular dynamics simulations that show density has a strong effect on the polyhedral connectivity. The liquid shows a broad distribution of Hf–Hf interactions, while the formation of low-density amorphous nanoclusters can reproduce the sharp split peak in the Hf–Hf partial pair distribution function observed in experiment. The agglomeration of amorphous nanoparticles condensed from the gas phase is associated with the formation of both edge-sharing and corner-sharing HfO6,7 polyhedra resembling that observed in the monoclinic phase.
- Authors:
-
- Argonne National Lab. (ANL), Argonne, IL (United States). X-ray Science Division
- Argonne National Lab. (ANL), Argonne, IL (United States). Argonne Leadership Computing Facility
- Univ. of California, Davis, CA (United States). Peter A. Rock Thermochemistry Lab. NEAT ORU
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Chemical and Engineering Materials Division
- Argonne National Lab. (ANL), Argonne, IL (United States). Global Security Sciences
- Argonne National Lab. (ANL), Argonne, IL (United States). Computing, Environment and Life Sciences
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Univ. of California, Davis, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); ANL Laboratory Directed Research and Development (LDRD) Program; National Science Foundation (NSF)
- OSTI Identifier:
- 1422595
- Grant/Contract Number:
- AC02-06CH11357; 1506229
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Materials
- Additional Journal Information:
- Journal Volume: 10; Journal Issue: 11; Journal ID: ISSN 1996-1944
- Publisher:
- MDPI
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; X-ray diffraction; neutron diffraction; molecular dynamics; liquid structure; amorphous materials; nanoparticles; hafnium oxide
Citation Formats
Gallington, Leighanne, Ghadar, Yasaman, Skinner, Lawrie, Weber, J., Ushakov, Sergey, Navrotsky, Alexandra, Vazquez-Mayagoitia, Alvaro, Neuefeind, Joerg, Stan, Marius, Low, John, and Benmore, Chris. The Structure of Liquid and Amorphous Hafnia. United States: N. p., 2017.
Web. doi:10.3390/ma10111290.
Gallington, Leighanne, Ghadar, Yasaman, Skinner, Lawrie, Weber, J., Ushakov, Sergey, Navrotsky, Alexandra, Vazquez-Mayagoitia, Alvaro, Neuefeind, Joerg, Stan, Marius, Low, John, & Benmore, Chris. The Structure of Liquid and Amorphous Hafnia. United States. https://doi.org/10.3390/ma10111290
Gallington, Leighanne, Ghadar, Yasaman, Skinner, Lawrie, Weber, J., Ushakov, Sergey, Navrotsky, Alexandra, Vazquez-Mayagoitia, Alvaro, Neuefeind, Joerg, Stan, Marius, Low, John, and Benmore, Chris. Fri .
"The Structure of Liquid and Amorphous Hafnia". United States. https://doi.org/10.3390/ma10111290. https://www.osti.gov/servlets/purl/1422595.
@article{osti_1422595,
title = {The Structure of Liquid and Amorphous Hafnia},
author = {Gallington, Leighanne and Ghadar, Yasaman and Skinner, Lawrie and Weber, J. and Ushakov, Sergey and Navrotsky, Alexandra and Vazquez-Mayagoitia, Alvaro and Neuefeind, Joerg and Stan, Marius and Low, John and Benmore, Chris},
abstractNote = {Understanding the atomic structure of amorphous solids is important in predicting and tuning their macroscopic behavior. Here, we use a combination of high-energy X-ray diffraction, neutron diffraction, and molecular dynamics simulations to benchmark the atomic interactions in the high temperature stable liquid and low-density amorphous solid states of hafnia. The diffraction results reveal an average Hf–O coordination number of ~7 exists in both the liquid and amorphous nanoparticle forms studied. The measured pair distribution functions are compared to those generated from several simulation models in the literature. We have also performed ab initio and classical molecular dynamics simulations that show density has a strong effect on the polyhedral connectivity. The liquid shows a broad distribution of Hf–Hf interactions, while the formation of low-density amorphous nanoclusters can reproduce the sharp split peak in the Hf–Hf partial pair distribution function observed in experiment. The agglomeration of amorphous nanoparticles condensed from the gas phase is associated with the formation of both edge-sharing and corner-sharing HfO6,7 polyhedra resembling that observed in the monoclinic phase.},
doi = {10.3390/ma10111290},
journal = {Materials},
number = 11,
volume = 10,
place = {United States},
year = {2017},
month = {11}
}
Web of Science
Works referenced in this record:
Area detector corrections for high quality synchrotron X-ray structure factor measurements
journal, January 2012
- Skinner, Lawrie B.; Benmore, Chris J.; Parise, John B.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 662, Issue 1
Generalized Gradient Approximation Made Simple
journal, October 1996
- Perdew, John P.; Burke, Kieron; Ernzerhof, Matthias
- Physical Review Letters, Vol. 77, Issue 18, p. 3865-3868
Constant pressure molecular dynamics for molecular systems
journal, December 1983
- Nosé, Shuichi; Klein, M. L.
- Molecular Physics, Vol. 50, Issue 5
Hafnia and hafnia-toughened ceramics
journal, January 1992
- Wang, J.; Li, H. P.; Stevens, R.
- Journal of Materials Science, Vol. 27, Issue 20
Crystal Structure of Monoclinic Hafnia and Comparison with Monoclinic Zirconia
journal, March 1970
- Ruh, Robert; Corfield, Peter W. R.
- Journal of the American Ceramic Society, Vol. 53, Issue 3
Diffusionless Phase Transformations in Zirconia and Hafnia
journal, September 1963
- Wolten, G. M.
- Journal of the American Ceramic Society, Vol. 46, Issue 9
Calorimetric Measurements of Surface Energy of Amorphous HfO 2 Nanoparticles Produced by Gas Phase Condensation
journal, May 2017
- Sharma, Geetu; Ushakov, Sergey V.; Li, Hui
- The Journal of Physical Chemistry C, Vol. 121, Issue 19
Thermodynamic modeling of the Hf–Si–O system
journal, December 2006
- Shin, Dongwon; Arróyave, Raymundo; Liu, Zi-Kui
- Calphad, Vol. 30, Issue 4
Computer "Experiments" on Classical Fluids. I. Thermodynamical Properties of Lennard-Jones Molecules
journal, July 1967
- Verlet, Loup
- Physical Review, Vol. 159, Issue 1
The System HfO2-TiO2
journal, June 1987
- Coutures, Jean Pierre; Coutures, Juliette
- Journal of the American Ceramic Society, Vol. 70, Issue 6
Joint diffraction and modeling approach to the structure of liquid alumina
journal, January 2013
- Skinner, Lawrie B.; Barnes, Adrian C.; Salmon, Philip S.
- Physical Review B, Vol. 87, Issue 2
Monoclinic Crystal Structures of ZrO2 and HfO2 Refined from X-ray Powder Diffraction Data
journal, October 1985
- Hann, Raiford E.; Suitch, Paul R.; Pentecost, Joseph L.
- Journal of the American Ceramic Society, Vol. 68, Issue 10
Synchrotron X-ray Scattering Measurements of Disordered Materials
journal, January 2016
- Kohara, Shinji; Ohara, Koji; Tajiri, Hiroo
- Zeitschrift für Physikalische Chemie, Vol. 230, Issue 3
Molecular dynamics simulation of amorphous HfO 2 for resistive RAM applications
journal, July 2014
- Broglia, G.; Ori, G.; Larcher, L.
- Modelling and Simulation in Materials Science and Engineering, Vol. 22, Issue 6
Isothermal-isobaric molecular dynamics using stochastic velocity rescaling
journal, February 2009
- Bussi, Giovanni; Zykova-Timan, Tatyana; Parrinello, Michele
- The Journal of Chemical Physics, Vol. 130, Issue 7
Amorphous Alumina Nanoparticles: Structure, Surface Energy, and Thermodynamic Phase Stability
journal, August 2013
- Tavakoli, Amir H.; Maram, Pardha Saradhi; Widgeon, Scarlett J.
- The Journal of Physical Chemistry C, Vol. 117, Issue 33
Fast Parallel Algorithms for Short-Range Molecular Dynamics
journal, March 1995
- Plimpton, Steve
- Journal of Computational Physics, Vol. 117, Issue 1
The Zirconia?Hafnia System: DTA Measurements and Thermodynamic Calculations
journal, December 2006
- Wang, Chong; Zinkevich, Matvei; Aldinger, Fritz
- Journal of the American Ceramic Society, Vol. 89, Issue 12
Synthesis of nanophase ZnO, Eu2O3, and ZrO2 by gas-phase condensation with cw-CO2 laser heating
journal, July 1995
- Eilers, Hergen; Tissue, Brian M.
- Materials Letters, Vol. 24, Issue 4
Der Schmelzpunkt des Hafniumoxydes
journal, July 1925
- Henning, F.
- Die Naturwissenschaften, Vol. 13, Issue 30
Oxygen-related defects in amorphous HfO2 gate dielectrics
journal, September 2007
- Kaneta, C.; Yamasaki, T.
- Microelectronic Engineering, Vol. 84, Issue 9-10
Proposed Phase Relations in the HfO 2 -Rich Portion of the System Hf-HfO 2
journal, November 1973
- Ruh, Robert; Patel, Vinod A.
- Journal of the American Ceramic Society, Vol. 56, Issue 11
Quickstep: Fast and accurate density functional calculations using a mixed Gaussian and plane waves approach
journal, April 2005
- VandeVondele, Joost; Krack, Matthias; Mohamed, Fawzi
- Computer Physics Communications, Vol. 167, Issue 2
Neutron scattering lengths and cross sections
journal, January 1992
- Sears, Varley F.
- Neutron News, Vol. 3, Issue 3
Low Cation Coordination in Oxide Melts
journal, April 2014
- Skinner, L. B.; Benmore, C. J.; Weber, J. K. R.
- Physical Review Letters, Vol. 112, Issue 15
Amorphous and via a melt-and-quench scheme using ab initio molecular dynamics
journal, May 2008
- Scopel, Wanderlã L.; da Silva, Antônio J. R.; Fazzio, A.
- Physical Review B, Vol. 77, Issue 17
PDFgetX2: a GUI-driven program to obtain the pair distribution function from X-ray powder diffraction data
journal, July 2004
- Qiu, Xiangyun; Thompson, Jeroen W.; Billinge, Simon J. L.
- Journal of Applied Crystallography, Vol. 37, Issue 4, p. 678-678
Evolutionary Optimization of a Charge Transfer Ionic Potential Model for Ta/Ta-Oxide Heterointerfaces
journal, April 2017
- Sasikumar, Kiran; Narayanan, Badri; Cherukara, Mathew
- Chemistry of Materials, Vol. 29, Issue 8
A unified formulation of the constant temperature molecular dynamics methods
journal, July 1984
- Nosé, Shuichi
- The Journal of Chemical Physics, Vol. 81, Issue 1
Phase stability of hafnium oxide and zirconium oxide on silicon substrate
journal, August 2007
- Shin, Dongwon; Liu, Zi-Kui
- Scripta Materialia, Vol. 57, Issue 3
A comparison of various commonly used correlation functions for describing total scattering
journal, April 2001
- Keen, David A.
- Journal of Applied Crystallography, Vol. 34, Issue 2
MDTraj: A Modern Open Library for the Analysis of Molecular Dynamics Trajectories
journal, October 2015
- McGibbon, Robert T.; Beauchamp, Kyle A.; Harrigan, Matthew P.
- Biophysical Journal, Vol. 109, Issue 8
Modified charge transfer–embedded atom method potential for metal/metal oxide systems
journal, January 2004
- Zhou, X. W.; Wadley, H. N. G.; Filhol, J. -S.
- Physical Review B, Vol. 69, Issue 3
NXFit : a program for simultaneously fitting X-ray and neutron diffraction pair-distribution functions to provide optimized structural parameters
journal, September 2014
- Pickup, David; Moss, Robert; Newport, Robert
- Journal of Applied Crystallography, Vol. 47, Issue 5
Electrostatic potentials for metal-oxide surfaces and interfaces
journal, October 1994
- Streitz, F. H.; Mintmire, J. W.
- Physical Review B, Vol. 50, Issue 16
Gaussian basis sets for accurate calculations on molecular systems in gas and condensed phases
journal, September 2007
- VandeVondele, Joost; Hutter, Jürg
- The Journal of Chemical Physics, Vol. 127, Issue 11
Structural and dielectric properties of amorphous and
journal, September 2006
- Ceresoli, Davide; Vanderbilt, David
- Physical Review B, Vol. 74, Issue 12
On the use of modification functions when Fourier transforming total scattering data
journal, October 2012
- Soper, Alan K.; Barney, Emma R.
- Journal of Applied Crystallography, Vol. 45, Issue 6
First principles study of the structural, electronic, and dielectric properties of amorphous HfO 2
journal, September 2011
- Chen, Tsung-Ju; Kuo, Chin-Lung
- Journal of Applied Physics, Vol. 110, Issue 6
The Nanoscale Ordered MAterials Diffractometer NOMAD at the Spallation Neutron Source SNS
journal, September 2012
- Neuefeind, Jörg; Feygenson, Mikhail; Carruth, John
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 287
In situ Study of the Crystallization from Amorphous to Cubic Zirconium Oxide: Rietveld and Reverse Monte Carlo Analyses
journal, June 2007
- Zhang, Feng; Chupas, Peter J.; Lui, Siu Lun Alan
- Chemistry of Materials, Vol. 19, Issue 13
Structure and dielectric properties of amorphous high- oxides: HfO , ZrO , and their alloys
journal, June 2012
- Wang, Yin; Zahid, Ferdows; Wang, Jian
- Physical Review B, Vol. 85, Issue 22
Separable dual-space Gaussian pseudopotentials
journal, July 1996
- Goedecker, S.; Teter, M.; Hutter, J.
- Physical Review B, Vol. 54, Issue 3
Universal Medium-Range Order of Amorphous Metal Oxides
journal, October 2013
- Nishio, Kengo; Miyazaki, Takehide; Nakamura, Hisao
- Physical Review Letters, Vol. 111, Issue 15
Canonical dynamics: Equilibrium phase-space distributions
journal, March 1985
- Hoover, William G.
- Physical Review A, Vol. 31, Issue 3
Atomic and electronic structures of amorphous ZrO2 and HfO2 films
journal, August 2005
- Gritsenko, Vladimir; Gritsenko, Daryja; Shaimeev, Sergei
- Microelectronic Engineering, Vol. 81, Issue 2-4
Structural, electronic, and dielectric properties of amorphous from ab initio molecular dynamics
journal, February 2005
- Zhao, Xinyuan; Ceresoli, Davide; Vanderbilt, David
- Physical Review B, Vol. 71, Issue 8
Benchmark oxygen-oxygen pair-distribution function of ambient water from x-ray diffraction measurements with a wide Q -range
journal, February 2013
- Skinner, Lawrie B.; Huang, Congcong; Schlesinger, Daniel
- The Journal of Chemical Physics, Vol. 138, Issue 7
Low-temperature polymorphs of and : A density-functional theory study
journal, October 2005
- Jaffe, John E.; Bachorz, Rafał A.; Gutowski, Maciej
- Physical Review B, Vol. 72, Issue 14
Über die Schmelzpunkte des Zirkonoxydes und des Hafniumoxydes
journal, February 1932
- Clausing, P.
- Zeitschrift für anorganische und allgemeine Chemie, Vol. 204, Issue 1-2
A charge transfer ionic–embedded atom method potential for the O–Al–Ni–Co–Fe system
journal, May 2005
- Zhou, Xiao Wang; Wadley, Haydn N. G.
- Journal of Physics: Condensed Matter, Vol. 17, Issue 23
Ion migration in crystalline and amorphous HfO X
journal, March 2017
- Schie, Marcel; Müller, Michael P.; Salinga, Martin
- The Journal of Chemical Physics, Vol. 146, Issue 9
Cutoff Errors in the Ewald Summation Formulae for Point Charge Systems
journal, January 1992
- Kolafa, Jiri; Perram, John W.
- Molecular Simulation, Vol. 9, Issue 5
Atomic and electronic structure of amorphous and crystalline hafnium oxide: X-ray photoelectron spectroscopy and density functional calculations
journal, March 2007
- Perevalov, T. V.; Gritsenko, V. A.; Erenburg, S. B.
- Journal of Applied Physics, Vol. 101, Issue 5
Two-dimensional detector software: From real detector to idealised image or two-theta scan
journal, January 1996
- Hammersley, A. P.; Svensson, S. O.; Hanfland, M.
- High Pressure Research, Vol. 14, Issue 4-6, p. 235-248
Works referencing / citing this record:
Combined computational and experimental investigation of high temperature thermodynamics and structure of cubic ZrO2 and HfO2
journal, October 2018
- Hong, Qi-Jun; Ushakov, Sergey V.; Kapush, Denys
- Scientific Reports, Vol. 8, Issue 1
Temperature gradients for thermophysical and thermochemical property measurements to 3000 °C for an aerodynamically levitated spheroid
journal, January 2019
- McCormack, Scott J.; Tamalonis, Anthony; Weber, Richard J. K.
- Review of Scientific Instruments, Vol. 90, Issue 1
Intrinsic charge trapping in amorphous oxide films: status and challenges
journal, May 2018
- Strand, Jack; Kaviani, Moloud; Gao, David
- Journal of Physics: Condensed Matter, Vol. 30, Issue 23
Characterizing the Charge Trapping across Crystalline and Amorphous Si/SiO 2 /HfO 2 Stacks from First-Principle Calculations
journal, December 2019
- Liu, Yue-Yang; Liu, Feilong; Wang, Runsheng
- Physical Review Applied, Vol. 12, Issue 6
Amorphous tantala and its relationship with the molten state
journal, April 2018
- Alderman, O. L. G.; Benmore, C. J.; Neuefeind, J.
- Physical Review Materials, Vol. 2, Issue 4
In‐situ determination of the HfO 2 –Ta 2 O 5 ‐temperature phase diagram up to 3000°C
journal, January 2019
- McCormack, Scott J.; Tseng, Kuo‐Pin; Weber, Richard J. K.
- Journal of the American Ceramic Society, Vol. 102, Issue 8