Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method

Lu, Ping; Moya, Jaime M.; Yuan, Renliang; Zuo, Jian Min

doi:10.1016/j.ultramic.2017.12.003

Title: Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method

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Abstract

The delocalization of x-ray signals limits the spatial resolution in atomic-scale elemental mapping by scanning transmission electron microscopy (STEM) using energy-dispersive x-ray spectroscopy (EDS). In this study, using a SrTiO₃ [001] single crystal, we show that the x-ray localization to atomic columns is strongly dependent on crystal thickness, and a thin crystal is critical for improving the spatial resolution in atomic-scale EDS mapping. A single-frame scanning technique is used in this study instead of the multiple-frame technique to avoid peak broadening due to tracking error. The strong thickness dependence is realized by measuring the full width at half maxima (FWHM) as well as the peak-to-valley (P/V) ratio of the EDS profiles for Ti K and Sr K+L, obtained at several crystal thicknesses. A FWHM of about 0.16 nm and a P/V ratio of greater than 7.0 are obtained for Ti K for a crystal thickness of less than 20 nm. In conclusion, with increasing crystal thickness, the FWHM and P/V ratio increases and decreases, respectively, indicating the advantage of using a thin crystal for high-resolution EDS mapping.

Authors:

Lu, Ping ^[1]; Moya, Jaime M. ^[1]; Yuan, Renliang ^[2];

^[2]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Univ. of Illinois, Urbana-Champaign, IL (United States). Dept. of Materials Science and Engineering

Publication Date:: 2018-03-01

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1421612

Alternate Identifier(s):: OSTI ID: 1548906

Report Number(s):: SAND-2017-8813J
Journal ID: ISSN 0304-3991; 656319

Grant/Contract Number:: AC04-94AL85000; NA0003525

Resource Type:: Accepted Manuscript

Journal Name:: Ultramicroscopy

Additional Journal Information:: Journal Volume: 186; Journal Issue: C; Journal ID: ISSN 0304-3991

Publisher:: Elsevier

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 42 ENGINEERING; Atomic-scale EDS; STEM; X-ray localization; Thickness dependence; Single-frame scanning method

Citation Formats


                    Lu, Ping, Moya, Jaime M., Yuan, Renliang, and Zuo, Jian Min. Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method.  United States: N. p., 2018. 
Web.  doi:10.1016/j.ultramic.2017.12.003.

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                    Lu, Ping, Moya, Jaime M., Yuan, Renliang, & Zuo, Jian Min. Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method.  United States.  https://doi.org/10.1016/j.ultramic.2017.12.003

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                    Lu, Ping, Moya, Jaime M., Yuan, Renliang, and Zuo, Jian Min. Thu .  
"Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method".  United States.  https://doi.org/10.1016/j.ultramic.2017.12.003.  https://www.osti.gov/servlets/purl/1421612.

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@article{osti_1421612,

  title        = {Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method},

  author       = {Lu, Ping and Moya, Jaime M. and Yuan, Renliang and Zuo, Jian Min},

  abstractNote = {The delocalization of x-ray signals limits the spatial resolution in atomic-scale elemental mapping by scanning transmission electron microscopy (STEM) using energy-dispersive x-ray spectroscopy (EDS). In this study, using a SrTiO3 [001] single crystal, we show that the x-ray localization to atomic columns is strongly dependent on crystal thickness, and a thin crystal is critical for improving the spatial resolution in atomic-scale EDS mapping. A single-frame scanning technique is used in this study instead of the multiple-frame technique to avoid peak broadening due to tracking error. The strong thickness dependence is realized by measuring the full width at half maxima (FWHM) as well as the peak-to-valley (P/V) ratio of the EDS profiles for Ti K and Sr K+L, obtained at several crystal thicknesses. A FWHM of about 0.16 nm and a P/V ratio of greater than 7.0 are obtained for Ti K for a crystal thickness of less than 20 nm. In conclusion, with increasing crystal thickness, the FWHM and P/V ratio increases and decreases, respectively, indicating the advantage of using a thin crystal for high-resolution EDS mapping.},

  doi          = {10.1016/j.ultramic.2017.12.003},

  journal      = {Ultramicroscopy},

  number       = C,

  volume       = 186,

  place        = {United States},

  year         = {2018},

  month        = {3}

}

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