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Title: A one-dimensional ion beam figuring system for x-ray mirror fabrication

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [2] ;  [3] ;  [3] ;  [3] ;  [4]
  1. NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA
  2. Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA
  3. Kaufman &, Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, Colorado 80524, USA
  4. College of Mechatronics and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, China, Hu’nan Key Laboratory of Ultra-precision Machining Technology, Changsha, Hunan 410073, China
Publication Date:
Grant/Contract Number:
AC-02-06CH11357; SC0012704
Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 10; Related Information: CHORUS Timestamp: 2018-02-15 03:02:27; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1421270