skip to main content

DOE PAGESDOE PAGES

Title: Activation of the dimers and tetramers of metal amidinate atomic layer deposition precursors upon adsorption on silicon oxide surfaces

Authors:
 [1] ;  [2] ; ; ; ; ;  [2] ;  [1]
  1. Department of Chemistry, University of California, Riverside, California 92521
  2. Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716
Publication Date:
Grant/Contract Number:
FG02-03ER46599
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 1; Related Information: CHORUS Timestamp: 2018-02-15 02:10:02; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1421264