He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching

Metzler, Dominik; Weilnboeck, Florian; Engelmann, Sebastian; Bruce, Robert L.; Oehrlein, Gottlieb S.

doi:10.1116/1.4949274

Title: He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching

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Authors:

Metzler, Dominik ^[1]; Weilnboeck, Florian ^[1]; Engelmann, Sebastian ^[2]; Bruce, Robert L. ^[2]; Oehrlein, Gottlieb S. ^[1]

Department of Materials Science and Engineering, and Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20740
IBM T. J. Watson Research Center, Yorktown Heights, New York 10598

Publication Date:: Wed May 11 00:00:00 EDT 2016

Sponsoring Org.:: USDOE

OSTI Identifier:: 1421255

Grant/Contract Number:: SC0001939

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Additional Journal Information:: Journal Name: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena Journal Volume: 34 Journal Issue: 4; Journal ID: ISSN 2166-2746

Publisher:: American Vacuum Society

Country of Publication:: United States

Language:: English

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                    Metzler, Dominik, Weilnboeck, Florian, Engelmann, Sebastian, Bruce, Robert L., and Oehrlein, Gottlieb S. He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching.  United States: N. p., 2016. 
Web.  doi:10.1116/1.4949274.

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                    Metzler, Dominik, Weilnboeck, Florian, Engelmann, Sebastian, Bruce, Robert L., & Oehrlein, Gottlieb S. He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching.  United States.  https://doi.org/10.1116/1.4949274

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                    Metzler, Dominik, Weilnboeck, Florian, Engelmann, Sebastian, Bruce, Robert L., and Oehrlein, Gottlieb S. Wed .  
"He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching".  United States.  https://doi.org/10.1116/1.4949274.

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@article{osti_1421255,

  title        = {He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etching},

  author       = {Metzler, Dominik and Weilnboeck, Florian and Engelmann, Sebastian and Bruce, Robert L. and Oehrlein, Gottlieb S.},

  abstractNote = {},

  doi          = {10.1116/1.4949274},

  journal      = {Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},

  number       = 4,

  volume       = 34,

  place        = {United States},

  year         = {Wed May 11 00:00:00 EDT 2016},

  month        = {Wed May 11 00:00:00 EDT 2016}

}

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