Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers
- Authors:
-
[1]
; [1]
; [1]
- Electrical and Computer Engineering Department and NSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, Colorado 80523, USA
- Publication Date:
- Grant/Contract Number:
- AC02-98CH10886
- Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Name: Review of Scientific Instruments Journal Volume: 86 Journal Issue: 12; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics
- Sponsoring Org:
- USDOE
- Country of Publication:
- United States
- Language:
- English
- OSTI Identifier:
- 1421254