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Title: Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers

Authors:
 [1];  [1];  [1]
  1. Electrical and Computer Engineering Department and NSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, Colorado 80523, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1421254
Grant/Contract Number:  
AC02-98CH10886
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Name: Review of Scientific Instruments Journal Volume: 86 Journal Issue: 12; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Li, W., Urbanski, L., and Marconi, M. C. Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers. United States: N. p., 2015. Web. doi:10.1063/1.4937899.
Li, W., Urbanski, L., & Marconi, M. C. Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers. United States. doi:10.1063/1.4937899.
Li, W., Urbanski, L., and Marconi, M. C. Tue . "Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers". United States. doi:10.1063/1.4937899.
@article{osti_1421254,
title = {Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers},
author = {Li, W. and Urbanski, L. and Marconi, M. C.},
abstractNote = {},
doi = {10.1063/1.4937899},
journal = {Review of Scientific Instruments},
number = 12,
volume = 86,
place = {United States},
year = {2015},
month = {12}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1063/1.4937899

Citation Metrics:
Cited by: 5 works
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Works referenced in this record:

Pattern-integrated interference [Invited]
journal, December 2012

  • Gaylord, Thomas K.; Leibovici, Matthieu C. R.; Burrow, Guy M.
  • Applied Optics, Vol. 52, Issue 1
  • DOI: 10.1364/AO.52.000061

Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system
journal, November 2013

  • Li, Wei; Martinez Esquiroz, Victor; Urbanski, Lukasz
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 6
  • DOI: 10.1116/1.4826344

Polychromatic Self-imaging
journal, February 1988


Pattern-integrated interference lithography: single-exposure fabrication of photonic-crystal structures
journal, January 2012

  • Burrow, Guy M.; Leibovici, Matthieu C. R.; Gaylord, Thomas K.
  • Applied Optics, Vol. 51, Issue 18
  • DOI: 10.1364/AO.51.004028

Demonstration of a Discharge Pumped Table-Top Soft-X-Ray Laser
journal, October 1994


Development of a low current discharge-driven soft x-ray laser
journal, August 2007


Dynamics of converging laser-created plasmas in semicylindrical cavities studied using soft x-ray laser interferometry
journal, October 2007


Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique
journal, January 2005

  • Lai, Ngoc Diep; Liang, Wen Ping; Lin, Jian Hung
  • Optics Express, Vol. 13, Issue 23
  • DOI: 10.1364/OPEX.13.009605

Large-Area Fabrication of Periodic Arrays of Nanoholes in Metal Films and Their Application in Biosensing and Plasmonic-Enhanced Photovoltaics
journal, September 2010

  • Menezes, Jacson W.; Ferreira, Jacqueline; Santos, Marcos J. L.
  • Advanced Functional Materials, Vol. 20, Issue 22
  • DOI: 10.1002/adfm.201001262

Montgomery self-imaging effect using computer-generated diffractive optical elements
journal, September 2003


High-Brightness Injection-Seeded Soft-X-Ray-Laser Amplifier Using a Solid Target
journal, September 2006


Nanofabrication
journal, February 1990

  • Smith, Henry I.; Craighead, Harold G.
  • Physics Today, Vol. 43, Issue 2
  • DOI: 10.1063/1.881222

Pattern-Integrated Interference Lithography: Prospects for Nano- and Microelectronics
journal, January 2012

  • Leibovici, Matthieu C. R.; Burrow, Guy M.; Gaylord, Thomas K.
  • Optics Express, Vol. 20, Issue 21
  • DOI: 10.1364/OE.20.023643

Achromatic interferometric lithography for 100-nm-period gratings and grids
journal, November 1995

  • Savas, T. A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 13, Issue 6
  • DOI: 10.1116/1.588255

Demonstration of a High Average Power Tabletop Soft X-Ray Laser
journal, December 1998


Quasi-self-imaging using aperiodic sequences
journal, January 1992


Patterning of circular structure arrays with interference lithography
journal, January 2003

  • Solak, Harun H.; David, Christian
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
  • DOI: 10.1116/1.1622943

Recording oscillations of sub-micron size cantilevers by extreme ultraviolet Fourier transform holography
journal, January 2014

  • Monserud, Nils C.; Malm, Erik B.; Wachulak, Przemyslaw W.
  • Optics Express, Vol. 22, Issue 4
  • DOI: 10.1364/oe.22.004161

Optical and Interferometric Lithography - Nanotechnology Enablers
journal, October 2005


Extreme ultraviolet Talbot interference lithography
journal, January 2015


Nanopatterning with UV Optical Lithography
journal, December 2005

  • Rothschild, M.; Bloomstein, T. M.; Efremow, N.
  • MRS Bulletin, Vol. 30, Issue 12
  • DOI: 10.1557/mrs2005.247

Fabrication of photonic crystals for the visible spectrum by holographic lithography
journal, March 2000

  • Campbell, M.; Sharp, D. N.; Harrison, M. T.
  • Nature, Vol. 404, Issue 6773, p. 53-56
  • DOI: 10.1038/35003523

Achromatic spatial frequency multiplication: A method for production of nanometer-scale periodic structures
journal, January 2005

  • Solak, Harun H.; Ekinci, Yasin
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6
  • DOI: 10.1116/1.2121735

Three-dimensional nanoscale molecular imaging by extreme ultraviolet laser ablation mass spectrometry
journal, April 2015

  • Kuznetsov, Ilya; Filevich, Jorge; Dong, Feng
  • Nature Communications, Vol. 6, Issue 1
  • DOI: 10.1038/ncomms7944

Spectral linewidth of a Ne-like Ar capillary discharge soft-x-ray laser and its dependence on amplification beyond gain saturation
journal, March 2012


Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
journal, January 2007

  • Wachulak, P. W.; Capeluto, M. G.; Marconi, M. C.
  • Optics Express, Vol. 15, Issue 6
  • DOI: 10.1364/OE.15.003465

Self-Imaging Objects of Infinite Aperture*
journal, January 1967

  • Montgomery, W. Duane
  • Journal of the Optical Society of America, Vol. 57, Issue 6
  • DOI: 10.1364/JOSA.57.000772

Sub-10 nm imprint lithography and applications
journal, November 1997

  • Chou, Stephen Y.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6
  • DOI: 10.1116/1.589752

Pattern-integrated interference lithography: Vector modeling and 1D, 2D, and 3D device structures
journal, November 2013

  • Leibovici, Matthieu C. R.; Gaylord, Thomas K.
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 6
  • DOI: 10.1116/1.4826560

Talbot lithography: Self-imaging of complex structures
journal, January 2009

  • Isoyan, A.; Jiang, F.; Cheng, Y. C.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
  • DOI: 10.1116/1.3258144

Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light
journal, January 2006

  • Vaschenko, G.; Brewer, C.; Brizuela, F.
  • Optics Letters, Vol. 31, Issue 9
  • DOI: 10.1364/OL.31.001214

Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser
journal, January 2012

  • Carbajo, S.; Howlett, I. D.; Brizuela, F.
  • Optics Letters, Vol. 37, Issue 14
  • DOI: 10.1364/OL.37.002994

Capillary discharge soft X-ray laslng in Ne-like Ar pumped by long current pulses
journal, April 2002

  • Tomassetti, G.; Ritucci, A.; Reale, A.
  • The European Physical Journal D, Vol. 19, Issue 1
  • DOI: 10.1140/epjd/e20020057

Wavelength-Independent Optical Polarizer Based on Metallic Nanowire Arrays
journal, December 2011


Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier
journal, January 1999

  • Macchietto, C. D.; Benware, B. R.; Rocca, J. J.
  • Optics Letters, Vol. 24, Issue 16
  • DOI: 10.1364/OL.24.001115

Parametric constraints in multi-beam interference
journal, October 2012

  • Burrow, Guy M.; Gaylord, Thomas K.
  • Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 4
  • DOI: 10.1117/1.jmm.11.4.043004

Immersion lithography at 157 nm
journal, January 2001

  • Switkes, M.; Rothschild, M.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6
  • DOI: 10.1116/1.1412895

Demonstration of Nanomachining With Focused Extreme Ultraviolet Laser Beams
journal, January 2012

  • Bravo, Herman; Szapiro, Ben T.; Wachulak, Przemyslaw W.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 18, Issue 1
  • DOI: 10.1109/JSTQE.2011.2158392

Large-area metallic photonic crystal fabrication with interference lithography and dry etching
journal, July 2005


Liquid immersion lithography: Why, how, and when?
journal, January 2004

  • Rothschild, M.; Bloomstein, T. M.; Kunz, R. R.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 6
  • DOI: 10.1116/1.1802955

Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers
journal, January 2007

  • Wachulak, P. W.; Capeluto, M. G.; Marconi, M. C.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
  • DOI: 10.1116/1.2801870

Laser output and multiple pinches of plasma in capillary discharge
journal, December 2008


Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm
journal, January 2008


Nanolithography with coherent extreme ultraviolet light
journal, May 2006


Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors
journal, December 2011

  • Siegfried, T.; Ekinci, Y.; Solak, H. H.
  • Applied Physics Letters, Vol. 99, Issue 26
  • DOI: 10.1063/1.3672045

Analysis of a scheme for de-magnified Talbot lithography
journal, November 2011

  • Urbanski, L.; Marconi, M. C.; Isoyan, A.
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6
  • DOI: 10.1116/1.3653507

Displacement Talbot lithography: a new method for high-resolution patterning of large areas
journal, January 2011

  • Solak, Harun H.; Dais, Christian; Clube, Francis
  • Optics Express, Vol. 19, Issue 11
  • DOI: 10.1364/OE.19.010686

Effects of Plasma Dynamics on Lasing in Fast Capillary Discharge
journal, April 2008

  • Sakamoto, Nobuhiro; Masnavi, Majid; Nakajima, Mitsuo
  • Japanese Journal of Applied Physics, Vol. 47, Issue 4
  • DOI: 10.1143/JJAP.47.2250

Measurement of the Spatial Coherence Buildup in a Discharge Pumped Table-Top Soft X-Ray Laser
journal, October 1997


Large-area patterning for photonic crystals via coherent diffraction lithography
journal, January 2004

  • Zanke, Christel; Qi, Minghao; Smith, Henry I.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 6
  • DOI: 10.1116/1.1813448

Fourier Images: I - The Point Source
journal, May 1957


Rapid fabrication of large-area periodic structures containing well-defined defects by combining holography and mask techniques
journal, January 2005

  • Lai, Ngoc Diep; Liang, Wen Ping; Lin, Jian Hung
  • Optics Express, Vol. 13, Issue 14
  • DOI: 10.1364/OPEX.13.005331

All fourteen Bravais lattices can be formed by interference of four noncoplanar beams
journal, January 2002


Talbot interferometry with anisotropic gratings
journal, February 1986


Analysis of a two-dimensional photonic bandgap structure fabricated by an interferometric lithographic system
journal, January 2007

  • Chien, Cheng-Wei; Lee, Yun-Chih; Lee, Po-Shen
  • Applied Optics, Vol. 46, Issue 16
  • DOI: 10.1364/AO.46.003196

Fourier Images: II - The Out-of-focus Patterns
journal, May 1957


Fourier Images: III - Finite Sources
journal, May 1957


Fractional Montgomery effect: a self-imaging phenomenon
journal, January 2005

  • Lohmann, Adolf W.; Knuppertz, Hans; Jahns, Jürgen
  • Journal of the Optical Society of America A, Vol. 22, Issue 8
  • DOI: 10.1364/JOSAA.22.001500

Ordered magnetic nanostructures: fabrication and properties
journal, January 2003


Interference lithography by a soft x-ray laser beam: Nanopatterning on photoresists
journal, August 2007

  • Ritucci, A.; Reale, A.; Zuppella, P.
  • Journal of Applied Physics, Vol. 102, Issue 3
  • DOI: 10.1063/1.2764244

Discharge‐pumped soft‐x‐ray laser in neon‐like argon
journal, June 1995

  • Rocca, J. J.; Tomasel, F. G.; Marconi, M. C.
  • Physics of Plasmas, Vol. 2, Issue 6
  • DOI: 10.1063/1.871216

An interferometer based on the Talbot effect
journal, February 1971


Efficient Excitation of Gain-Saturated Sub-9-nm-Wavelength Tabletop Soft-X-Ray Lasers and Lasing Down to 7.36 nm
journal, December 2011


Nanoimprint lithography
journal, November 1996

  • Chou, Stephen Y.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 6
  • DOI: 10.1116/1.588605

Fabrication of a 2D photonic bandgap by a holographic method
journal, January 1997

  • Berger, V.; Gauthier-Lafaye, O.; Costard, E.
  • Electronics Letters, Vol. 33, Issue 5
  • DOI: 10.1049/el:19970230

Ablation of organic polymers by 46.9-nm-laser radiation
journal, January 2005

  • Juha, L.; Bittner, M.; Chvostova, D.
  • Applied Physics Letters, Vol. 86, Issue 3
  • DOI: 10.1063/1.1854741

Restoration of Faulty Images of Periodic Objects by Means of Self-Imaging
journal, January 1971


Talbot interferometry with a vibrating phase object
journal, May 1983


Extreme ultraviolet lithography with table top lasers
journal, July 2010


Short-wavelength ablation of polymers in the high-fluence regime
journal, May 2014


Breaking DNA strands by extreme-ultraviolet laser pulses in vacuum
journal, April 2015


Fractional Talbot lithography with extreme ultraviolet light
journal, January 2014

  • Kim, Hyun-su; Li, Wei; Danylyuk, Serhiy
  • Optics Letters, Vol. 39, Issue 24
  • DOI: 10.1364/OL.39.006969

Chiral microstructures (spirals) fabrication by holographic lithography
journal, January 2005

  • Pang, Yee Kwong; Lee, Jeffrey Chi Wai; Lee, Hung Fai
  • Optics Express, Vol. 13, Issue 19
  • DOI: 10.1364/OPEX.13.007615

Photonic-crystal waveguide structure by pattern-integrated interference lithography
journal, January 2015

  • Leibovici, Matthieu C. R.; Gaylord, Thomas K.
  • Optics Letters, Vol. 40, Issue 12
  • DOI: 10.1364/OL.40.002806

Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser
journal, February 2001


Specialized Electron Beam Nanolithography for EUV and X-Ray Diffractive Optics
journal, January 2006


Table top nanopatterning with extreme ultraviolet laser illumination
journal, May 2007

  • Capeluto, M. G.; Wachulak, P.; Marconi, M. C.
  • Microelectronic Engineering, Vol. 84, Issue 5-8
  • DOI: 10.1016/j.mee.2007.01.018

Evidence of Soft X-Ray Lasing in SIGNAL Pulsed-Power Facility Experiments With Argon Capillary Plasma
journal, October 2006

  • Ostashev, V. I.; Gafarov, A. M.; Politov, V. Y.
  • IEEE Transactions on Plasma Science, Vol. 34, Issue 5
  • DOI: 10.1109/TPS.2006.878366

Electron beam lithography patterning of sub-10 nm line using hydrogen silsesquioxane for nanoscale device applications
journal, January 2005

  • Baek, In-Bok; Yang, Jong-Heon; Cho, Won-Ju
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6
  • DOI: 10.1116/1.2132328

Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography
journal, May 2008


Nanolithography using extreme ultraviolet lithography interferometry: 19 nm lines and spaces
journal, January 1999

  • Solak, H. H.; He, D.; Li, W.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue 6
  • DOI: 10.1116/1.590953

Nanostructures and Functional Materials Fabricated by Interferometric Lithography
journal, October 2010


Nanoimprint lithography: An old story in modern times? A review
journal, January 2008

  • Schift, Helmut
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 2, Article No. 458
  • DOI: 10.1116/1.2890972

Properties of large-area nanomagnet arrays with 100 nm period made by interferometric lithography
journal, April 1999

  • Savas, T. A.; Farhoud, M.; Smith, Henry I.
  • Journal of Applied Physics, Vol. 85, Issue 8
  • DOI: 10.1063/1.370029

Defect-tolerant extreme ultraviolet nanoscale printing
journal, January 2012


Toward a full optimization of a highly saturated soft-X-ray laser beam produced in extremely long capillary discharge amplifiers
journal, February 2004


XXV. On copying diffraction-gratings, and on some phenomena connected therewith
journal, March 1881

  • Rayleigh, Lord
  • The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, Vol. 11, Issue 67
  • DOI: 10.1080/14786448108626995

LXXVI. Facts relating to optical science. No. IV
journal, December 1836

  • Talbot, H. F.
  • The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, Vol. 9, Issue 56
  • DOI: 10.1080/14786443608649032

Demonstration of a desk-top size high repetition rate soft x-ray laser
journal, January 2005


Coherent diffraction lithography: Periodic patterns via mask-based interference lithography
journal, January 2009

  • Fucetola, Corey P.; Patel, Amil A.; Moon, Euclid E.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
  • DOI: 10.1116/1.3237093

Defect tolerant extreme ultraviolet lithography technique
journal, November 2012

  • Urbanski, Lukasz; Li, Wei; Rocca, Jorge J.
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6
  • DOI: 10.1116/1.4758758