Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers
- Authors:
-
- Electrical and Computer Engineering Department and NSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, Colorado 80523, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1421254
- Grant/Contract Number:
- AC02-98CH10886
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Name: Review of Scientific Instruments Journal Volume: 86 Journal Issue: 12; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Li, W., Urbanski, L., and Marconi, M. C. Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers. United States: N. p., 2015.
Web. doi:10.1063/1.4937899.
Li, W., Urbanski, L., & Marconi, M. C. Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers. United States. doi:10.1063/1.4937899.
Li, W., Urbanski, L., and Marconi, M. C. Tue .
"Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers". United States. doi:10.1063/1.4937899.
@article{osti_1421254,
title = {Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers},
author = {Li, W. and Urbanski, L. and Marconi, M. C.},
abstractNote = {},
doi = {10.1063/1.4937899},
journal = {Review of Scientific Instruments},
number = 12,
volume = 86,
place = {United States},
year = {2015},
month = {12}
}
Free Publicly Available Full Text
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DOI: 10.1063/1.4937899
DOI: 10.1063/1.4937899
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