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Title: Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [2]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, California 94720
  2. Inpria Corporation, 2001 NW Monroe Ave., Suite 203, Corvallis, Oregon 97330
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1421218
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics Journal Volume: 33 Journal Issue: 6; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Benk, Markus P., Goldberg, Kenneth A., Wojdyla, Antoine, Anderson, Christopher N., Salmassi, Farhad, Naulleau, Patrick P., and Kocsis, Michael. Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope. United States: N. p., 2015. Web. doi:10.1116/1.4929509.
Benk, Markus P., Goldberg, Kenneth A., Wojdyla, Antoine, Anderson, Christopher N., Salmassi, Farhad, Naulleau, Patrick P., & Kocsis, Michael. Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope. United States. doi:10.1116/1.4929509.
Benk, Markus P., Goldberg, Kenneth A., Wojdyla, Antoine, Anderson, Christopher N., Salmassi, Farhad, Naulleau, Patrick P., and Kocsis, Michael. Sun . "Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope". United States. doi:10.1116/1.4929509.
@article{osti_1421218,
title = {Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope},
author = {Benk, Markus P. and Goldberg, Kenneth A. and Wojdyla, Antoine and Anderson, Christopher N. and Salmassi, Farhad and Naulleau, Patrick P. and Kocsis, Michael},
abstractNote = {},
doi = {10.1116/1.4929509},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
number = 6,
volume = 33,
place = {United States},
year = {2015},
month = {11}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1116/1.4929509

Citation Metrics:
Cited by: 7 works
Citation information provided by
Web of Science

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