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Title: Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [2]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, California 94720
  2. Inpria Corporation, 2001 NW Monroe Ave., Suite 203, Corvallis, Oregon 97330
Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 33; Journal Issue: 6; Related Information: CHORUS Timestamp: 2018-02-15 01:05:21; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1421218