skip to main content

DOE PAGESDOE PAGES

Title: Optimization of a chlorine-based deep vertical etch of GaN demonstrating low damage and low roughness

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1]
  1. Electrical and Computer Engineering Department, UC Santa Barbara, Santa Barbara, California 93106
Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 34 Journal Issue: 3; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
Country of Publication:
United States
Language:
English
OSTI Identifier:
1421145

Tahhan, Maher, Nedy, Joseph, Chan, Silvia H., Lund, Cory, Li, Haoran, Gupta, Geetak, Keller, Stacia, and Mishra, Umesh. Optimization of a chlorine-based deep vertical etch of GaN demonstrating low damage and low roughness. United States: N. p., Web. doi:10.1116/1.4944054.
Tahhan, Maher, Nedy, Joseph, Chan, Silvia H., Lund, Cory, Li, Haoran, Gupta, Geetak, Keller, Stacia, & Mishra, Umesh. Optimization of a chlorine-based deep vertical etch of GaN demonstrating low damage and low roughness. United States. doi:10.1116/1.4944054.
Tahhan, Maher, Nedy, Joseph, Chan, Silvia H., Lund, Cory, Li, Haoran, Gupta, Geetak, Keller, Stacia, and Mishra, Umesh. 2016. "Optimization of a chlorine-based deep vertical etch of GaN demonstrating low damage and low roughness". United States. doi:10.1116/1.4944054.
@article{osti_1421145,
title = {Optimization of a chlorine-based deep vertical etch of GaN demonstrating low damage and low roughness},
author = {Tahhan, Maher and Nedy, Joseph and Chan, Silvia H. and Lund, Cory and Li, Haoran and Gupta, Geetak and Keller, Stacia and Mishra, Umesh},
abstractNote = {},
doi = {10.1116/1.4944054},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 3,
volume = 34,
place = {United States},
year = {2016},
month = {5}
}