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Title: Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes

Authors:
 [1];  [2];  [2];  [3]
  1. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309
  2. InRedox, Longmont, Colorado 80544
  3. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309 and Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1421141
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 34 Journal Issue: 1; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Sharma, Kashish, Routkevitch, Dmitri, Varaksa, Natalia, and George, Steven M. Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes. United States: N. p., 2015. Web. doi:10.1116/1.4937728.
Sharma, Kashish, Routkevitch, Dmitri, Varaksa, Natalia, & George, Steven M. Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes. United States. doi:10.1116/1.4937728.
Sharma, Kashish, Routkevitch, Dmitri, Varaksa, Natalia, and George, Steven M. Thu . "Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes". United States. doi:10.1116/1.4937728.
@article{osti_1421141,
title = {Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes},
author = {Sharma, Kashish and Routkevitch, Dmitri and Varaksa, Natalia and George, Steven M.},
abstractNote = {},
doi = {10.1116/1.4937728},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 1,
volume = 34,
place = {United States},
year = {2015},
month = {12}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1116/1.4937728

Citation Metrics:
Cited by: 12 works
Citation information provided by
Web of Science

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