Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes
- Authors:
-
- Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309
- InRedox, Longmont, Colorado 80544
- Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309 and Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1421141
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 34 Journal Issue: 1; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Sharma, Kashish, Routkevitch, Dmitri, Varaksa, Natalia, and George, Steven M. Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes. United States: N. p., 2015.
Web. doi:10.1116/1.4937728.
Sharma, Kashish, Routkevitch, Dmitri, Varaksa, Natalia, & George, Steven M. Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes. United States. https://doi.org/10.1116/1.4937728
Sharma, Kashish, Routkevitch, Dmitri, Varaksa, Natalia, and George, Steven M. Thu .
"Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes". United States. https://doi.org/10.1116/1.4937728.
@article{osti_1421141,
title = {Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes},
author = {Sharma, Kashish and Routkevitch, Dmitri and Varaksa, Natalia and George, Steven M.},
abstractNote = {},
doi = {10.1116/1.4937728},
journal = {Journal of Vacuum Science and Technology A},
number = 1,
volume = 34,
place = {United States},
year = {Thu Dec 24 00:00:00 EST 2015},
month = {Thu Dec 24 00:00:00 EST 2015}
}
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https://doi.org/10.1116/1.4937728
https://doi.org/10.1116/1.4937728
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Cited by: 25 works
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Works referenced in this record:
Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li-Ion Batteries
journal, April 2010
- Jung, Yoon Seok; Cavanagh, Andrew S.; Riley, Leah A.
- Advanced Materials, Vol. 22, Issue 19
Ultrathin Coatings on Nano-LiCoO2 for Li-Ion Vehicular Applications
journal, February 2011
- Scott, Isaac D.; Jung, Yoon Seok; Cavanagh, Andrew S.
- Nano Letters, Vol. 11, Issue 2, p. 414-418
Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness
journal, January 2014
- Yersak, Alexander S.; Lee, Yung C.; Spencer, Joseph A.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1
Nanoscale Interface Modification of LiCoO 2 by Al 2 O 3 Atomic Layer Deposition for Solid-State Li Batteries
journal, January 2012
- Woo, Jae Ha; Trevey, James E.; Cavanagh, Andrew S.
- Journal of The Electrochemical Society, Vol. 159, Issue 7
Extremely low temperature growth of ZnO by atomic layer deposition
journal, February 2008
- Guziewicz, E.; Kowalik, I. A.; Godlewski, M.
- Journal of Applied Physics, Vol. 103, Issue 3
Highly Ordered Anodic Porous Alumina Formation by Self-Organized Anodizing
book, February 2008
- Sulka, Grzegorz D.
- Nanostructured Materials in Electrochemistry
Oxide Electronics by Spatial Atomic Layer Deposition
journal, December 2009
- Levy, David H.; Nelson, Shelby F.; Freeman, Diane
- Journal of Display Technology, Vol. 5, Issue 12
In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition
journal, March 2009
- Langereis, E.; Heil, S. B. S.; Knoops, H. C. M.
- Journal of Physics D: Applied Physics, Vol. 42, Issue 7
Effect of heat-treatment on Li 2 ZrO 3 -coated LiNi 1/3 Co 1/3 Mn 1/3 O 2 and its high voltage electrochemical performance
journal, December 2015
- Wang, Wanlin; Yin, Zhoulan; Wang, Jiapei
- Journal of Alloys and Compounds, Vol. 651
Low-Temperature Al2O3 Atomic Layer Deposition
journal, February 2004
- Groner, M. D.; Fabreguette, F. H.; Elam, J. W.
- Chemistry of Materials, Vol. 16, Issue 4, p. 639-645
Enhanced Cycleabity in Lithium Ion Batteries: Resulting from Atomic Layer Depostion of Al 2 O 3 or TiO 2 on LiCoO 2 Electrodes
journal, March 2012
- Cheng, Ho-Ming; Wang, Fu-Ming; Chu, Jinn P.
- The Journal of Physical Chemistry C, Vol. 116, Issue 14
Unexpected Improved Performance of ALD Coated LiCoO 2 /Graphite Li-Ion Batteries
journal, September 2012
- Jung, Yoon Seok; Lu, Peng; Cavanagh, Andrew S.
- Advanced Energy Materials, Vol. 3, Issue 2
Effects of Atomic Layer Deposition of Al2O3 on the Li[Li0.20Mn0.54Ni0.13Co0.13]O2 Cathode for Lithium-Ion Batteries
journal, January 2011
- Seok Jung, Yoon; Cavanagh, Andrew S.; Yan, Yanfa
- Journal of The Electrochemical Society, Vol. 158, Issue 12
Enhanced Stability of LiCoO2 Cathodes in Lithium-Ion Batteries Using Surface Modification by Atomic Layer Deposition
journal, January 2010
- Jung, Yoon Seok; Cavanagh, Andrew S.; Dillon, Anne C.
- Journal of The Electrochemical Society, Vol. 157, Issue 1, p. A75-A81
Electrochemical effects of ALD surface modification on combustion synthesized LiNi1/3Mn1/3Co1/3O2 as a layered-cathode material
journal, March 2011
- Riley, Leah A.; Van Atta, Sky; Cavanagh, Andrew S.
- Journal of Power Sources, Vol. 196, Issue 6
Amorphous Metal Fluoride Passivation Coatings Prepared by Atomic Layer Deposition on LiCoO 2 for Li-Ion Batteries
journal, March 2015
- Park, Joong Sun; Mane, Anil U.; Elam, Jeffrey W.
- Chemistry of Materials, Vol. 27, Issue 6
Continuous atomic layer deposition: Explanation for anomalous growth rate effects
journal, January 2012
- Maydannik, Philipp S.; Kaariainen, Tommi O.; Cameron, David. C.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1
High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
journal, July 2010
- Poodt, Paul; Lankhorst, Adriaan; Roozeboom, Fred
- Advanced Materials, Vol. 22, Issue 32
Structural and Electrochemical Study of Al 2 O 3 and TiO 2 Coated Li 1.2 Ni 0.13 Mn 0.54 Co 0.13 O 2 Cathode Material Using ALD
journal, June 2013
- Zhang, Xiaofeng; Belharouak, Ilias; Li, Li
- Advanced Energy Materials, Vol. 3, Issue 10
Atomic Layer Deposition: An Overview
journal, January 2010
- George, Steven M.
- Chemical Reviews, Vol. 110, Issue 1, p. 111-131
Atomic layer deposition of solid-state electrolyte coated cathode materials with superior high-voltage cycling behavior for lithium ion battery application
journal, January 2014
- Li, Xifei; Liu, Jian; Banis, Mohammad Norouzi
- Energy Environ. Sci., Vol. 7, Issue 2
An atomic layer deposition process for moving flexible substrates
journal, June 2011
- Maydannik, P. S.; Kääriäinen, T. O.; Cameron, D. C.
- Chemical Engineering Journal, Vol. 171, Issue 1
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
journal, January 2012
- Poodt, Paul; Cameron, David C.; Dickey, Eric
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1, Article No. 010802
Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition
journal, September 2003
- Elam, J. W.; Routkevitch, D.; Mardilovich, P. P.
- Chemistry of Materials, Vol. 15, Issue 18, p. 3507-3517
Improving high-capacity Li1.2Ni0.15Mn0.55Co0.1O2-based lithium-ion cells by modifiying the positive electrode with alumina
journal, July 2013
- Bettge, Martin; Li, Yan; Sankaran, Bharat
- Journal of Power Sources, Vol. 233
A novel architecture designed for lithium rich layered Li[Li 0.2 Mn 0.54 Ni 0.13 Co 0.13 ]O 2 oxides for lithium-ion batteries
journal, January 2015
- He, Zhenjiang; Wang, Zhixing; Huang, Zimo
- Journal of Materials Chemistry A, Vol. 3, Issue 32
Stable ZnO thin film transistors by fast open air atomic layer deposition
journal, May 2008
- Levy, David H.; Freeman, Diane; Nelson, Shelby F.
- Applied Physics Letters, Vol. 92, Issue 19
Particle Interaction and Aggregation in Cathode Material of Li-Ion Batteries: A Numerical Study
journal, January 2011
- Zhu, M.; Park, J.; Sastry, A. M.
- Journal of The Electrochemical Society, Vol. 158, Issue 10
Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head
journal, January 2012
- Ryan Fitzpatrick, P.; Gibbs, Zachary M.; George, Steven M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1
Spatial atomic layer deposition on flexible substrates using a modular rotating cylinder reactor
journal, January 2015
- Sharma, Kashish; Hall, Robert A.; George, Steven M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1