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Title: Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Authors:
 [1];  [2];  [3];  [4];  [3];  [3];  [3];  [5];  [2];  [3]
  1. Department of Chemical Engineering, Stanford University, Stanford, California 94305 and Department of Engineering Sciences, Division of Solid State Electronics, Uppsala University, 75121 Uppsala, Sweden
  2. ION-TOF GmbH, Heisenbergstraße 15, 48149 Münster, Germany
  3. Department of Chemical Engineering, Stanford University, Stanford, California 94305
  4. Department of Electrical Engineering, Stanford University, Stanford, California 94305
  5. Department of Material Science and Engineering, Stanford University, Stanford, California 94305
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1421137
Grant/Contract Number:  
SC0004782
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Journal Volume: 34 Journal Issue: 2; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Hägglund, Carl, Grehl, Thomas, Tanskanen, Jukka T., Yee, Ye Sheng, Mullings, Marja N., Mackus, Adriaan J. M., MacIsaac, Callisto, Clemens, Bruce M., Brongersma, Hidde H., and Bent, Stacey F. Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition. United States: N. p., 2016. Web. doi:10.1116/1.4941411.
Hägglund, Carl, Grehl, Thomas, Tanskanen, Jukka T., Yee, Ye Sheng, Mullings, Marja N., Mackus, Adriaan J. M., MacIsaac, Callisto, Clemens, Bruce M., Brongersma, Hidde H., & Bent, Stacey F. Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition. United States. doi:10.1116/1.4941411.
Hägglund, Carl, Grehl, Thomas, Tanskanen, Jukka T., Yee, Ye Sheng, Mullings, Marja N., Mackus, Adriaan J. M., MacIsaac, Callisto, Clemens, Bruce M., Brongersma, Hidde H., and Bent, Stacey F. Mon . "Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition". United States. doi:10.1116/1.4941411.
@article{osti_1421137,
title = {Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition},
author = {Hägglund, Carl and Grehl, Thomas and Tanskanen, Jukka T. and Yee, Ye Sheng and Mullings, Marja N. and Mackus, Adriaan J. M. and MacIsaac, Callisto and Clemens, Bruce M. and Brongersma, Hidde H. and Bent, Stacey F.},
abstractNote = {},
doi = {10.1116/1.4941411},
journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},
number = 2,
volume = 34,
place = {United States},
year = {2016},
month = {2}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1116/1.4941411

Citation Metrics:
Cited by: 4 works
Citation information provided by
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