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This content will become publicly available on November 15, 2018

Title: Tailoring nanopore formation in atomic layer deposited ultrathin films

Authors:
 [1] ; ; ; ;  [2] ; ; ; ; ;  [3]
  1. Department of Applied Physics, University of Technology Eindhoven, P.O. Box 503, Eindhoven 5600MB
  2. Department of Chemical and Materials Engineering, University of Alabama in Huntsville, Huntsville, Alabama 35899
  3. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439
Publication Date:
Grant/Contract Number:
AC02-06CH11357
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 36; Journal Issue: 1; Related Information: CHORUS Timestamp: 2018-02-14 21:21:12; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1421079