skip to main content

DOE PAGESDOE PAGES

Title: Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features

Authors:
 [1] ;  [2] ;  [2] ;  [2] ;  [1]
  1. Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122
  2. Lam Research Corp., 4650 Cushing Parkway, Fremont, California 94538
Publication Date:
Grant/Contract Number:
SC000319
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-02-14 19:02:16; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1420714