Insights to scaling remote plasma sources sustained in NF 3 mixtures
- Authors:
-
- Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122
- Samsung Electronics Co., Ltd., 129 Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do 443-742, South Korea
- Department of Physics and Astronomy, University College London, London WC1E 6BT, United Kingdom
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1420694
- Grant/Contract Number:
- SC0001319; SC0014132
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 35 Journal Issue: 3; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Huang, Shuo, Volynets, Vladimir, Hamilton, James R., Lee, Sangheon, Song, In-Cheol, Lu, Siqing, Tennyson, Jonathan, and Kushner, Mark J. Insights to scaling remote plasma sources sustained in NF 3 mixtures. United States: N. p., 2017.
Web. doi:10.1116/1.4978551.
Huang, Shuo, Volynets, Vladimir, Hamilton, James R., Lee, Sangheon, Song, In-Cheol, Lu, Siqing, Tennyson, Jonathan, & Kushner, Mark J. Insights to scaling remote plasma sources sustained in NF 3 mixtures. United States. https://doi.org/10.1116/1.4978551
Huang, Shuo, Volynets, Vladimir, Hamilton, James R., Lee, Sangheon, Song, In-Cheol, Lu, Siqing, Tennyson, Jonathan, and Kushner, Mark J. Mon .
"Insights to scaling remote plasma sources sustained in NF 3 mixtures". United States. https://doi.org/10.1116/1.4978551.
@article{osti_1420694,
title = {Insights to scaling remote plasma sources sustained in NF 3 mixtures},
author = {Huang, Shuo and Volynets, Vladimir and Hamilton, James R. and Lee, Sangheon and Song, In-Cheol and Lu, Siqing and Tennyson, Jonathan and Kushner, Mark J.},
abstractNote = {},
doi = {10.1116/1.4978551},
journal = {Journal of Vacuum Science and Technology A},
number = 3,
volume = 35,
place = {United States},
year = {Mon May 01 00:00:00 EDT 2017},
month = {Mon May 01 00:00:00 EDT 2017}
}
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