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Title: Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone

Authors:
 [1];  [2];  [2];  [1]
  1. Department of Chemistry, University of Minnesota, Minneapolis, Minnesota 55455
  2. Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1420479
Grant/Contract Number:  
USDOE/DE-EE0005319
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Journal Volume: 33 Journal Issue: 2; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Warner, Ellis J., Johnson, Forrest, Campbell, Stephen A., and Gladfelter, Wayne L. Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone. United States: N. p., 2015. Web. doi:10.1116/1.4907562.
Warner, Ellis J., Johnson, Forrest, Campbell, Stephen A., & Gladfelter, Wayne L. Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone. United States. doi:10.1116/1.4907562.
Warner, Ellis J., Johnson, Forrest, Campbell, Stephen A., and Gladfelter, Wayne L. Mon . "Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone". United States. doi:10.1116/1.4907562.
@article{osti_1420479,
title = {Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone},
author = {Warner, Ellis J. and Johnson, Forrest and Campbell, Stephen A. and Gladfelter, Wayne L.},
abstractNote = {},
doi = {10.1116/1.4907562},
journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},
number = 2,
volume = 33,
place = {United States},
year = {2015},
month = {2}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1116/1.4907562

Citation Metrics:
Cited by: 5 works
Citation information provided by
Web of Science

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