Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone

Warner, Ellis J.; Johnson, Forrest; Campbell, Stephen A.; Gladfelter, Wayne L.

doi:10.1116/1.4907562

Title: Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone

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Authors:

Warner, Ellis J. ^[1]; Johnson, Forrest ^[2]; Campbell, Stephen A. ^[2]; Gladfelter, Wayne L. ^[1]

Department of Chemistry, University of Minnesota, Minneapolis, Minnesota 55455
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455

Publication Date:: Mon Feb 09 00:00:00 EST 2015

Sponsoring Org.:: USDOE

OSTI Identifier:: 1420479

Grant/Contract Number:: USDOE/DE-EE0005319

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Additional Journal Information:: Journal Name: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Journal Volume: 33 Journal Issue: 2; Journal ID: ISSN 0734-2101

Publisher:: American Vacuum Society

Country of Publication:: United States

Language:: English

Citation Formats


                    Warner, Ellis J., Johnson, Forrest, Campbell, Stephen A., and Gladfelter, Wayne L. Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone.  United States: N. p., 2015. 
Web.  doi:10.1116/1.4907562.

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                    Warner, Ellis J., Johnson, Forrest, Campbell, Stephen A., & Gladfelter, Wayne L. Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone.  United States.  https://doi.org/10.1116/1.4907562

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                    Warner, Ellis J., Johnson, Forrest, Campbell, Stephen A., and Gladfelter, Wayne L. Mon .  
"Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone".  United States.  https://doi.org/10.1116/1.4907562.

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@article{osti_1420479,

  title        = {Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone},

  author       = {Warner, Ellis J. and Johnson, Forrest and Campbell, Stephen A. and Gladfelter, Wayne L.},

  abstractNote = {},

  doi          = {10.1116/1.4907562},

  journal      = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},

  number       = 2,

  volume       = 33,

  place        = {United States},

  year         = {Mon Feb 09 00:00:00 EST 2015},

  month        = {Mon Feb 09 00:00:00 EST 2015}

}

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Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone

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