Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis
- Authors:
-
- School of Chemical and Biomolecular Engineering Cornell University, Ithaca, New York 14853
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1420472
- Grant/Contract Number:
- DESC0006647
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 35 Journal Issue: 6; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Chen, Jiun-Ruey, Zhang, Wenyu, Nahm, Rambert K., DiFeo, Michael A., and Engstrom, James R. Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis. United States: N. p., 2017.
Web. doi:10.1116/1.4996553.
Chen, Jiun-Ruey, Zhang, Wenyu, Nahm, Rambert K., DiFeo, Michael A., & Engstrom, James R. Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis. United States. https://doi.org/10.1116/1.4996553
Chen, Jiun-Ruey, Zhang, Wenyu, Nahm, Rambert K., DiFeo, Michael A., and Engstrom, James R. Wed .
"Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis". United States. https://doi.org/10.1116/1.4996553.
@article{osti_1420472,
title = {Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis},
author = {Chen, Jiun-Ruey and Zhang, Wenyu and Nahm, Rambert K. and DiFeo, Michael A. and Engstrom, James R.},
abstractNote = {},
doi = {10.1116/1.4996553},
journal = {Journal of Vacuum Science and Technology A},
number = 6,
volume = 35,
place = {United States},
year = {Wed Nov 01 00:00:00 EDT 2017},
month = {Wed Nov 01 00:00:00 EDT 2017}
}
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https://doi.org/10.1116/1.4996553
https://doi.org/10.1116/1.4996553
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