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Title: A review of micromirror arrays

The aim of this article is to provide a review of micromirror array (MMA) technologies (2631 MMA research papers and patents were reviewed for this effort). The performance capabilities of 277 MMA designs from 49 companies and 23 academic research groups are categorized and compared. The designs are categorized according to (i) their array’s dimension (e.g., 2D arrays consisting of mirrors that cover a surface, 1D arrays consisting of mirrors in a row, and 0D arrays consisting of only a single mirror), (ii) the nature of the surface of their mirrors (e.g., continuous or discrete), (iii) what combination of tip, tilt, and/or piston degrees of freedom (DOFs) they achieve, and (iv) how they are actuated. Standardized performance metrics that can be systematically applied to every MMA design (e.g., mirror area, fill factor, pitch, range of motion, maximum acceleration, actuator energy density, and number of uncontrolled DOFs) are defined and plotted for existing designs to enable their fair comparison. Theoretical bounds on what is physically possible for MMAs to achieve are also derived and depicted in these plots to highlight the amount of performance improvement that remains to be achieved by future designs and guidelines are provided to aid in themore » development of these future designs.« less
Authors:
 [1] ;  [2] ;  [1]
  1. Univ. of California, Los Angeles, CA (United States). Mechanical and Aerospace Engineering
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States). Materials Engineering Division
Publication Date:
Report Number(s):
LLNL-JRNL-729264
Journal ID: ISSN 0141-6359
Grant/Contract Number:
AC52-07NA27344
Type:
Accepted Manuscript
Journal Name:
Precision Engineering
Additional Journal Information:
Journal Volume: 51; Journal Issue: C; Journal ID: ISSN 0141-6359
Publisher:
Elsevier
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Micromirrors; Arrays of Mirrors; MEMS; Micro-reflectors; Flexures; Micro-actuators
OSTI Identifier:
1418903

Song, Yuanping, Panas, Robert M., and Hopkins, Jonathan B.. A review of micromirror arrays. United States: N. p., Web. doi:10.1016/j.precisioneng.2017.08.012.
Song, Yuanping, Panas, Robert M., & Hopkins, Jonathan B.. A review of micromirror arrays. United States. doi:10.1016/j.precisioneng.2017.08.012.
Song, Yuanping, Panas, Robert M., and Hopkins, Jonathan B.. 2017. "A review of micromirror arrays". United States. doi:10.1016/j.precisioneng.2017.08.012. https://www.osti.gov/servlets/purl/1418903.
@article{osti_1418903,
title = {A review of micromirror arrays},
author = {Song, Yuanping and Panas, Robert M. and Hopkins, Jonathan B.},
abstractNote = {The aim of this article is to provide a review of micromirror array (MMA) technologies (2631 MMA research papers and patents were reviewed for this effort). The performance capabilities of 277 MMA designs from 49 companies and 23 academic research groups are categorized and compared. The designs are categorized according to (i) their array’s dimension (e.g., 2D arrays consisting of mirrors that cover a surface, 1D arrays consisting of mirrors in a row, and 0D arrays consisting of only a single mirror), (ii) the nature of the surface of their mirrors (e.g., continuous or discrete), (iii) what combination of tip, tilt, and/or piston degrees of freedom (DOFs) they achieve, and (iv) how they are actuated. Standardized performance metrics that can be systematically applied to every MMA design (e.g., mirror area, fill factor, pitch, range of motion, maximum acceleration, actuator energy density, and number of uncontrolled DOFs) are defined and plotted for existing designs to enable their fair comparison. Theoretical bounds on what is physically possible for MMAs to achieve are also derived and depicted in these plots to highlight the amount of performance improvement that remains to be achieved by future designs and guidelines are provided to aid in the development of these future designs.},
doi = {10.1016/j.precisioneng.2017.08.012},
journal = {Precision Engineering},
number = C,
volume = 51,
place = {United States},
year = {2017},
month = {8}
}