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Title: Iron and intrinsic deep level states in Ga 2O 3

In this study, using a combination of deep level transient spectroscopy, secondary ion mass spectrometry, proton irradiation, and hybrid functional calculations, we identify two similar deep levels that are associated with Fe impurities and intrinsic defects in bulk crystals and molecular beam epitaxy and hydride vapor phase epitaxi-grown epilayers of β-Ga 2O 3. First, our results indicate that Fe Ga, and not an intrinsic defect, acts as the deep acceptor responsible for the often dominating E2 level at ~0.78 eV below the conduction band minimum. Second, by provoking additional intrinsic defect generation via proton irradiation, we identified the emergence of a new level, labeled as E2*, having the ionization energy very close to that of E2, but exhibiting an order of magnitude larger capture cross section. Importantly, the properties of E2* are found to be consistent with its intrinsic origin. As such, contradictory opinions of a long standing literature debate on either extrinsic or intrinsic origin of the deep acceptor in question converge accounting for possible contributions from E2 and E2* in different experimental conditions.
Authors:
ORCiD logo [1] ;  [2] ;  [1] ;  [1] ;  [3] ;  [3] ;  [3] ;  [1]
  1. Univ. of Oslo (Norway). Department of Physics/Centre for Materials Science and Nanotechnology
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. ABB Corporate Research, Segelhofstrasse (Switzerland)
Publication Date:
Report Number(s):
LLNL-JRNL-743968
Journal ID: ISSN 0003-6951; 898727
Grant/Contract Number:
AC52-07NA27344
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 112; Journal Issue: 4; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE
OSTI Identifier:
1417925
Alternate Identifier(s):
OSTI ID: 1458679