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This content will become publicly available on January 22, 2019

Title: Plasma studies of a linear magnetron operating in the range from DC to HiPIMS

Authors:
ORCiD logo [1] ; ORCiD logo [1]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Name: Journal of Applied Physics Journal Volume: 123 Journal Issue: 4; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1417719

Anders, André, and Yang, Yuchen. Plasma studies of a linear magnetron operating in the range from DC to HiPIMS. United States: N. p., Web. doi:10.1063/1.5017857.
Anders, André, & Yang, Yuchen. Plasma studies of a linear magnetron operating in the range from DC to HiPIMS. United States. doi:10.1063/1.5017857.
Anders, André, and Yang, Yuchen. 2018. "Plasma studies of a linear magnetron operating in the range from DC to HiPIMS". United States. doi:10.1063/1.5017857.
@article{osti_1417719,
title = {Plasma studies of a linear magnetron operating in the range from DC to HiPIMS},
author = {Anders, André and Yang, Yuchen},
abstractNote = {},
doi = {10.1063/1.5017857},
journal = {Journal of Applied Physics},
number = 4,
volume = 123,
place = {United States},
year = {2018},
month = {1}
}