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This content will become publicly available on January 22, 2019

Title: Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures

Authors:
 [1] ; ; ; ;
  1. Department of Materials Science and Engineering, North Carolina State University, 1001 Capability Drive, Raleigh, North Carolina 27695
Publication Date:
Grant/Contract Number:
NA-22-WMS-#66204
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 36; Journal Issue: 3; Related Information: CHORUS Timestamp: 2018-02-14 12:35:00; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1417700