Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures
Journal Article
·
· Journal of Vacuum Science and Technology B
- Department of Materials Science and Engineering, North Carolina State University, 1001 Capability Drive, Raleigh, North Carolina 27695
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- NA-22-WMS-#66204
- OSTI ID:
- 1417700
- Journal Information:
- Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Vol. 36 Journal Issue: 3; ISSN 2166-2746
- Publisher:
- American Vacuum SocietyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 8 works
Citation information provided by
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