Solid state dewetting of thin plasmonic films under focused cw-laser irradiation

Abbott, William M.; Corbett, Simon; Cunningham, Graeme; Petford-Long, Amanda; Zhang, Sheng; Donegan, John F.; McCloskey, David

doi:10.1016/j.actamat.2017.12.030

Title: Solid state dewetting of thin plasmonic films under focused cw-laser irradiation

Journal Article · 21 December 2017 · Acta Materialia

DOI: https://doi.org/10.1016/j.actamat.2017.12.030 · OSTI ID:1416974

Abbott, William M. ^[1]; Corbett, Simon ^[1]; Cunningham, Graeme ^[1]; Petford-Long, Amanda ^[2]; Zhang, Sheng ^[3]; Donegan, John F. ^[1]; McCloskey, David ^[1]

Trinity College Dublin, Dublin (Ireland). School of Physics, CRANN and AMBER
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division

Elevated temperatures and large thermal gradients are a significant source of component failure in microelectronics, and is the limiting factor in heat-assisted magnetic recording (HAMR). Here, we have investigated the effect of solid-state dewetting in Au thin films, as a function of local temperature, film thickness, and substrate adhesion. In this work, a localised temperature rise is induced in thin (≤ 50 nm) polycrystalline Au films on SiO₂ substrates via focused continuous-wave laser irradiation at 488 nm. The magnitude and distribution of the total temperature rise is measured using CCD-based thermoreflectance. This also allows a sensitive measurement of the temperature at which dewetting occurs, showing that for thin (≤ 50 nm) Au films without adhesion layers, rapid dewetting can occur at temperatures as low as 50° C. The time decay of the reflected light from the illuminating laser is used to monitor locally the dynamics of solid state dewetting. TEM diffraction analysis shows significant changes in the microstructure and crystallographic texture of the films as far as 10 µm away from the illuminated area. The use of a thin metallic adhesion layer (such as Ti or Cr) is shown to significantly improve the adhesion of the Au to the substrate and reduce the tendency towards dewetting, but does not entirely protect it from changes to the crystallographic texture.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; Science Foundation Ireland (SFI); Western Digital Technologies, Inc.; USDOE

Grant/Contract Number:: AC02-06CH11357; SFI/12/RC/2278

OSTI ID:: 1416974

Alternate ID(s):: OSTI ID: 1496407

Journal Information:: Acta Materialia, Vol. 145, Issue C; ISSN 1359-6454

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 16 works

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References (41)

Heat Assisted Magnetic Recording Kryder, M. H.; Gage, E. C.; McDaniel, T. W. Proceedings of the IEEE, Vol. 96, Issue 11 https://doi.org/10.1109/JPROC.2008.2004315	journal	November 2008
Heat-assisted magnetic recording by a near-field transducer with efficient optical energy transfer Challener, W. A.; Peng, Chubing; Itagi, A. V. Nature Photonics, Vol. 3, Issue 4 https://doi.org/10.1038/nphoton.2009.26	journal	March 2009
Thermal issues and their effects on heat-assisted magnetic recording system (invited) Xu, B. X.; Liu, Z. J.; Ji, R. Journal of Applied Physics, Vol. 111, Issue 7 https://doi.org/10.1063/1.3671421	journal	April 2012
Periodic mass shedding of a retracting solid film step Wong, Harris; Voorhees, P. W.; Miksis, M. J. Acta Materialia, Vol. 48, Issue 8 https://doi.org/10.1016/S1359-6454(00)00016-1	journal	May 2000
Solid-State Dewetting of Thin Films Thompson, Carl V. Annual Review of Materials Research, Vol. 42, Issue 1 https://doi.org/10.1146/annurev-matsci-070511-155048	journal	August 2012
Tunable Localized Plasmon Transducers Prepared by Thermal Dewetting of Percolated Evaporated Gold Films Tesler, Alexander B.; Chuntonov, Lev; Karakouz, Tanya The Journal of Physical Chemistry C, Vol. 115, Issue 50 https://doi.org/10.1021/jp209114j	journal	November 2011
Anisotropic hole growth during solid-state dewetting of single-crystal Au–Fe thin films Amram, D.; Klinger, L.; Rabkin, E. Acta Materialia, Vol. 60, Issue 6-7 https://doi.org/10.1016/j.actamat.2012.02.009	journal	April 2012
Solid state dewetting and stress relaxation in a thin single crystalline Ni film on sapphire Rabkin, E.; Amram, D.; Alster, E. Acta Materialia, Vol. 74 https://doi.org/10.1016/j.actamat.2014.04.020	journal	August 2014
Refractory Plasmonics Guler, U.; Boltasseva, A.; Shalaev, V. M. Science, Vol. 344, Issue 6181 https://doi.org/10.1126/science.1252722	journal	April 2014
Dewetting of Au and AuPt alloy films: A dewetting zone model Manuela Müller, Claudia; Spolenak, Ralph Journal of Applied Physics, Vol. 113, Issue 9 https://doi.org/10.1063/1.4794028	journal	March 2013
Thermal stability and electrical properties of Ag–Ti films and Ti/Ag/Ti films prepared by sputtering Kawamura, M.; Zhang, Z.; Kiyono, R. Vacuum, Vol. 87 https://doi.org/10.1016/j.vacuum.2012.02.021	journal	January 2013
Engineering gold alloys for plasmonics Nishijima, Yoshiaki; Hashimoto, Yoshikazu; Seniutinas, Gediminas Applied Physics A, Vol. 117, Issue 2 https://doi.org/10.1007/s00339-014-8716-5	journal	September 2014
Solid-state dewetting of ultra-thin Au films on SiO ₂ and HfO ₂ Seguini, G.; Llamoja Curi, J.; Spiga, S. Nanotechnology, Vol. 25, Issue 49 https://doi.org/10.1088/0957-4484/25/49/495603	journal	November 2014
Dewetting behavior of electron-beam-deposited Au thin films on various substrates: graphenes, quartz, and SiO2 wafers Lee, Seung-Hwan; Kwak, Eun-Hye; Jeong, Goo-Hwan Applied Physics A, Vol. 118, Issue 2 https://doi.org/10.1007/s00339-014-8913-2	journal	December 2014
Thin film metallization of oxides in microelectronics Mattox, D. M. Thin Solid Films, Vol. 18, Issue 2 https://doi.org/10.1016/0040-6090(73)90096-5	journal	November 1973
Gold thin-film electrodes: an EQCM study of the influence of chromium and titanium adhesion layers on the response Hoogvliet, J. C.; van Bennekom, W. P. Electrochimica Acta, Vol. 47, Issue 4 https://doi.org/10.1016/S0013-4686(01)00793-9	journal	November 2001
Influence of Ti and Cr Adhesion Layers on Ultrathin Au Films Todeschini, Matteo; Bastos da Silva Fanta, Alice; Jensen, Flemming ACS Applied Materials & Interfaces, Vol. 9, Issue 42 https://doi.org/10.1021/acsami.7b10136	journal	October 2017
Metallic Adhesion Layer Induced Plasmon Damping and Molecular Linker as a Nondamping Alternative Habteyes, Terefe G.; Dhuey, Scott; Wood, Erin ACS Nano, Vol. 6, Issue 6 https://doi.org/10.1021/nn301885u	journal	May 2012
Effect of Thin Cr and Cu Adhesion Layers on Surface Plasmon Resonance at Au/SiO ₂ Interfaces Chow, Cheng-Ming; Bain, James A. IEEE Transactions on Magnetics, Vol. 52, Issue 7 https://doi.org/10.1109/TMAG.2015.2509252	journal	July 2016
Annealing Effects on Interfacial Fracture of Gold-Chromium Films in Hybrid Microcircuits Moody, N. R.; Adams, D. P.; Volinsky, A. A. MRS Proceedings, Vol. 586 https://doi.org/10.1557/PROC-586-195	journal	January 1999
Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS Moazzez, Behrang; O'Brien, Stacey; Merschrod S., Erika Sensors, Vol. 13, Issue 6 https://doi.org/10.3390/s130607021	journal	May 2013
CCD-based thermoreflectance microscopy: principles and applications Farzaneh, M.; Maize, K.; Lüerßen, D. Journal of Physics D: Applied Physics, Vol. 42, Issue 14 https://doi.org/10.1088/0022-3727/42/14/143001	journal	June 2009
Capillary instabilities in thin, continuous films Jiran, E.; Thompson, C. V. Thin Solid Films, Vol. 208, Issue 1 https://doi.org/10.1016/0040-6090(92)90941-4	journal	February 1992
Comparison of the agglomeration behavior of Au and Cu films sputter deposited on silicon dioxide Kwon, Jang-Yeon; Yoon, Tae-Sik; Kim, Ki-Bum Journal of Applied Physics, Vol. 93, Issue 6 https://doi.org/10.1063/1.1556178	journal	March 2003
Solid-State Thermal Dewetting of Just-Percolated Gold Films Evaporated on Glass: Development of the Morphology and Optical Properties Tesler, Alexander B.; Maoz, Ben M.; Feldman, Yishay The Journal of Physical Chemistry C, Vol. 117, Issue 21 https://doi.org/10.1021/jp400895z	journal	May 2013
Grain-boundary grooving by surface diffusion with strong surface energy anisotropy Xin, Tinghui; Wong, Harris Acta Materialia, Vol. 51, Issue 8 https://doi.org/10.1016/S1359-6454(03)00039-9	journal	May 2003
Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films Favaloro, T.; Bahk, J. -H.; Shakouri, A. Review of Scientific Instruments, Vol. 86, Issue 2 https://doi.org/10.1063/1.4907354	journal	February 2015
Characterization of thin metal films via frequency-domain thermoreflectance Schmidt, Aaron J.; Cheaito, Ramez; Chiesa, Matteo Journal of Applied Physics, Vol. 107, Issue 2 https://doi.org/10.1063/1.3289907	journal	January 2010
Capillary instabilities in thin films Jiran, E.; Thompson, C. V. Journal of Electronic Materials, Vol. 19, Issue 11 https://doi.org/10.1007/BF02673327	journal	November 1990
Microstructure evolution during dewetting in thin Au films Müller, Claudia Manuela; Spolenak, Ralph Acta Materialia, Vol. 58, Issue 18 https://doi.org/10.1016/j.actamat.2010.07.021	journal	October 2010
Microstructural evolution and solid state dewetting of epitaxial Al thin films on sapphire (α-Al2O3) Hieke, S. W.; Breitbach, B.; Dehm, G. Acta Materialia, Vol. 133 https://doi.org/10.1016/j.actamat.2017.05.026	journal	July 2017
Reliability challenges for copper interconnects Li, Baozhen; Sullivan, Timothy D.; Lee, Tom C. Microelectronics Reliability, Vol. 44, Issue 3 https://doi.org/10.1016/j.microrel.2003.11.004	journal	March 2004
Structure and electrical conductivity of cosputtered gold‐chromium alloy films Slusark, W.; Lalevic, B.; Fuschillo, N. Journal of Applied Physics, Vol. 44, Issue 6 https://doi.org/10.1063/1.1662667	journal	June 1973
Thermodynamic assessment of the Au-Ti system Luo, Weikun; Jin, Zhanpeng; Liu, Huashan Calphad, Vol. 25, Issue 1 https://doi.org/10.1016/S0364-5916(01)00026-8	journal	March 2001
Void formation in gold films on yttrium-doped zirconia in the initial stage of de-wetting Shaffir, Eran; Kauffmann, Yaron; Riess, Ilan Acta Materialia, Vol. 79 https://doi.org/10.1016/j.actamat.2014.07.009	journal	October 2014
Texture evolution and microstructural changes during solid-state dewetting: A correlative study by complementary in situ TEM techniques Niekiel, Florian; Kraschewski, Simon M.; Schweizer, Peter Acta Materialia, Vol. 115 https://doi.org/10.1016/j.actamat.2016.05.026	journal	August 2016
Texture development in polycrystalline thin films Thompson, Carl. V.; Carel, Roland Materials Science and Engineering: B, Vol. 32, Issue 3 https://doi.org/10.1016/0921-5107(95)03011-5	journal	July 1995
Hillock formation during electromigration in Cu and Al thin films: Three‐dimensional grain growth Gladkikh, A.; Lereah, Y.; Glickman, E. Applied Physics Letters, Vol. 66, Issue 10 https://doi.org/10.1063/1.113240	journal	March 1995
Development of 〈110〉 texture in copper thin films Wei, H. L.; Huang, Hanchen; Woo, C. H. Applied Physics Letters, Vol. 80, Issue 13 https://doi.org/10.1063/1.1466518	journal	April 2002
Biaxial alignment in sputter deposited thin films Mahieu, S.; Ghekiere, P.; Depla, D. Thin Solid Films, Vol. 515, Issue 4 https://doi.org/10.1016/j.tsf.2006.06.027	journal	December 2006
Advanced engineering of single-crystal gold nanoantennas Méjard, R.; Verdy, A.; Demichel, O. Optical Materials Express, Vol. 7, Issue 4 https://doi.org/10.1364/OME.7.001157	journal	January 2017

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