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Title: Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides

Abstract

The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents here a critical step to 3D photonic integration using VμRCs.

Authors:
 [1];  [1];  [1];  [1]; ORCiD logo [1]
  1. Univ. of Illinois, Urbana, IL (United States). Dept. of Electrical and Computer Engineering. Micro and Nanotechnology Lab.
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); Cisco Systems, Inc. (United States)
OSTI Identifier:
1510944
Alternate Identifier(s):
OSTI ID: 1416643
Grant/Contract Number:  
FG02-07ER46471; ECCS-1055941; CG-624009
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 112; Journal Issue: 2; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; semiconductors; finite-element analysis; waveguides; metal oxides; chemical compounds and components; electric currents; chemical elements; general topology; electrooptical devices; electrical properties and parameters

Citation Formats

Yu, Xin, Goddard, Lynford L., Zhu, Jinlong, Li, Xiuling, and Chen, Xiaogang. Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides. United States: N. p., 2018. Web. doi:10.1063/1.5017707.
Yu, Xin, Goddard, Lynford L., Zhu, Jinlong, Li, Xiuling, & Chen, Xiaogang. Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides. United States. https://doi.org/10.1063/1.5017707
Yu, Xin, Goddard, Lynford L., Zhu, Jinlong, Li, Xiuling, and Chen, Xiaogang. Thu . "Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides". United States. https://doi.org/10.1063/1.5017707. https://www.osti.gov/servlets/purl/1510944.
@article{osti_1510944,
title = {Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides},
author = {Yu, Xin and Goddard, Lynford L. and Zhu, Jinlong and Li, Xiuling and Chen, Xiaogang},
abstractNote = {The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents here a critical step to 3D photonic integration using VμRCs.},
doi = {10.1063/1.5017707},
journal = {Applied Physics Letters},
number = 2,
volume = 112,
place = {United States},
year = {Thu Jan 11 00:00:00 EST 2018},
month = {Thu Jan 11 00:00:00 EST 2018}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 6 works
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Figures / Tables:

FIG. 1 FIG. 1: Optical microscopy image of two VμRCs with different effective diameters monolithically integrated on a 2 μm wide ridge waveguide, before (a) and after (b) rolling up. Both VμRCs have the same inner diameter, but the left one has 4.52 coiled turns while the right one has 5.77 turns.more » (c) and (d) show a 4.52 coiled-turn microring before and after rolling up. Axial confinement is provided by a 2 μm wide, 7 nm thick a-Si strip directly above the ridge waveguide. Optical lithography is used for accurate alignment.« less

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Works referencing / citing this record:

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability
journal, December 2018


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