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This content will become publicly available on December 19, 2018

Title: Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor

Authors:
 [1] ;  [1] ;  [1] ;  [2]
  1. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309
  2. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309 and Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309
Publication Date:
Grant/Contract Number:
EE0005771
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 36 Journal Issue: 1; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1414050