skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Role of the dense amorphous carbon layer in photoresist etching

Authors:
 [1];  [2];  [2];  [3];  [1]
  1. Department of Materials Science and Engineering, Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742
  2. Department of Chemistry and Biochemistry, University of Maryland, College Park, Maryland 20742
  3. Department of Chemistry and Biochemistry, University of Maryland, College Park, Maryland 20742, Institute for Physical Science and Technology, University of Maryland, College Park, Maryland 20742, and Center for Nanophysics and Advanced Materials, University of Maryland, College Park, Maryland 20742
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1414017
Grant/Contract Number:  
SC0001939
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology A
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 36 Journal Issue: 2; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Pranda, Adam, Gutierrez Razo, Sandra A., Tomova, Zuleykhan, Fourkas, John T., and Oehrlein, Gottlieb S. Role of the dense amorphous carbon layer in photoresist etching. United States: N. p., 2018. Web. doi:10.1116/1.5009640.
Pranda, Adam, Gutierrez Razo, Sandra A., Tomova, Zuleykhan, Fourkas, John T., & Oehrlein, Gottlieb S. Role of the dense amorphous carbon layer in photoresist etching. United States. doi:10.1116/1.5009640.
Pranda, Adam, Gutierrez Razo, Sandra A., Tomova, Zuleykhan, Fourkas, John T., and Oehrlein, Gottlieb S. Thu . "Role of the dense amorphous carbon layer in photoresist etching". United States. doi:10.1116/1.5009640.
@article{osti_1414017,
title = {Role of the dense amorphous carbon layer in photoresist etching},
author = {Pranda, Adam and Gutierrez Razo, Sandra A. and Tomova, Zuleykhan and Fourkas, John T. and Oehrlein, Gottlieb S.},
abstractNote = {},
doi = {10.1116/1.5009640},
journal = {Journal of Vacuum Science and Technology A},
number = 2,
volume = 36,
place = {United States},
year = {2018},
month = {3}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1116/1.5009640

Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

Save / Share: