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Title: Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses

Abstract

Here, we report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm2. By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm2 and an object image with a resolution of 13 × 13 nm2. Finally, the significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1413936
Report Number(s):
BNL-114537-2017-JA
Journal ID: ISSN 1094-4087; OPEXFF; TRN: US1800593
Grant/Contract Number:  
SC0012704
Resource Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 25; Journal Issue: 8; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; X-ray optics; Phase retrieval; Deposition and fabrication

Citation Formats

Huang, Xiaojing, Xu, Weihe, Nazaretski, Evgeny, Bouet, Nathalie, Zhou, Juan, Chu, Yong S., and Yan, Hanfei. Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses. United States: N. p., 2017. Web. doi:10.1364/OE.25.008698.
Huang, Xiaojing, Xu, Weihe, Nazaretski, Evgeny, Bouet, Nathalie, Zhou, Juan, Chu, Yong S., & Yan, Hanfei. Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses. United States. doi:10.1364/OE.25.008698.
Huang, Xiaojing, Xu, Weihe, Nazaretski, Evgeny, Bouet, Nathalie, Zhou, Juan, Chu, Yong S., and Yan, Hanfei. Wed . "Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses". United States. doi:10.1364/OE.25.008698. https://www.osti.gov/servlets/purl/1413936.
@article{osti_1413936,
title = {Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses},
author = {Huang, Xiaojing and Xu, Weihe and Nazaretski, Evgeny and Bouet, Nathalie and Zhou, Juan and Chu, Yong S. and Yan, Hanfei},
abstractNote = {Here, we report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm2. By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm2 and an object image with a resolution of 13 × 13 nm2. Finally, the significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.},
doi = {10.1364/OE.25.008698},
journal = {Optics Express},
number = 8,
volume = 25,
place = {United States},
year = {2017},
month = {4}
}

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Works referenced in this record:

Multilayer Laue lenses as high-resolution x-ray optics
conference, November 2004

  • Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan
  • Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
  • DOI: 10.1117/12.560046

Hard x-ray nanofocusing by multilayer Laue lenses
journal, June 2014


Multilayer Laue Lens: A Brief History and Current Status
journal, July 2016


Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens
journal, March 2006


11 nm hard X-ray focus from a large-aperture multilayer Laue lens
journal, December 2013

  • Huang, Xiaojing; Yan, Hanfei; Nazaretski, Evgeny
  • Scientific Reports, Vol. 3, Issue 1
  • DOI: 10.1038/srep03562

High numerical aperture multilayer Laue lenses
journal, June 2015

  • Morgan, Andrew J.; Prasciolu, Mauro; Andrejczuk, Andrzej
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep09892

Efficiency of a multilayer-Laue-lens with a 102 μm aperture
journal, August 2015

  • Macrander, Albert T.; Kubec, Adam; Conley, Raymond
  • Applied Physics Letters, Vol. 107, Issue 8
  • DOI: 10.1063/1.4929505

Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses
journal, January 2011

  • Yan, Hanfei; Rose, Volker; Shu, Deming
  • Optics Express, Vol. 19, Issue 16
  • DOI: 10.1364/OE.19.015069

Pushing the limits: an instrument for hard X-ray imaging below 20 nm
journal, January 2015


Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope
journal, March 2013

  • Nazaretski, E.; Kim, Jungdae; Yan, H.
  • Review of Scientific Instruments, Vol. 84, Issue 3
  • DOI: 10.1063/1.4774387

Bonded Multilayer Laue Lens for focusing hard X-rays
journal, November 2007

  • Liu, Chian; Conley, R.; Qian, J.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 582, Issue 1
  • DOI: 10.1016/j.nima.2007.08.077

Full-field X-ray microscopy with crossed partial multilayer Laue lenses
journal, January 2014

  • Niese, Sven; Krüger, Peter; Kubec, Adam
  • Optics Express, Vol. 22, Issue 17
  • DOI: 10.1364/OE.22.020008

A theoretical study of two-dimensional point focusing by two multilayer Laue lenses
conference, August 2008

  • Yan, Hanfei; Maser, Jorg; Kang, Hyon Chol
  • Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.795721

Development and characterization of monolithic multilayer Laue lens nanofocusing optics
journal, June 2016

  • Nazaretski, E.; Xu, W.; Bouet, N.
  • Applied Physics Letters, Vol. 108, Issue 26
  • DOI: 10.1063/1.4955022

Advanced multilayer Laue lens fabrication at NSLS-II
conference, October 2012

  • Conley, Ray; Bouet, Nathalie; Zhou, Juan
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.930216

Characterization of a multilayer Laue lens with imperfections
journal, November 2007

  • Yan, H.; Kang, H. C.; Maser, J.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 582, Issue 1
  • DOI: 10.1016/j.nima.2007.08.080

WSi 2 /Si multilayer sectioning by reactive ion etching for multilayer Laue lens fabrication
conference, August 2010

  • Bouet, N.; Conley, R.; Biancarosa, J.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.865306

Design and performance of a scanning ptychography microscope
journal, March 2014

  • Nazaretski, E.; Huang, X.; Yan, H.
  • Review of Scientific Instruments, Vol. 85, Issue 3
  • DOI: 10.1063/1.4868968

Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture
journal, September 2007


Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm
journal, January 2011

  • Chen, Tsung-Yu; Chen, Yu-Tung; Wang, Cheng-Liang
  • Optics Express, Vol. 19, Issue 21
  • DOI: 10.1364/OE.19.019919

X-Ray Microscopic Studies of the Drosophila Dosage Compensation Complex
journal, November 2000

  • Vogt, S.; Schneider, G.; Steuernagel, A.
  • Journal of Structural Biology, Vol. 132, Issue 2
  • DOI: 10.1006/jsbi.2000.4277

Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens
journal, January 2015

  • Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie
  • Optics Express, Vol. 23, Issue 10
  • DOI: 10.1364/OE.23.012496

An improved ptychographical phase retrieval algorithm for diffractive imaging
journal, September 2009


Movable Aperture Lensless Transmission Microscopy: A Novel Phase Retrieval Algorithm
journal, July 2004


High-Resolution Scanning X-ray Diffraction Microscopy
journal, July 2008


Role of the illumination spatial-frequency spectrum for ptychography
journal, September 2012


    Works referencing / citing this record:

    Multilayer Laue lenses at high X-ray energies: performance and applications
    journal, January 2019

    • Murray, Kevin T.; Pedersen, Anders F.; Mohacsi, Istvan
    • Optics Express, Vol. 27, Issue 5
    • DOI: 10.1364/oe.27.007120

    Multilayer Laue lenses at high X-ray energies: performance and applications
    journal, January 2019

    • Murray, Kevin T.; Pedersen, Anders F.; Mohacsi, Istvan
    • Optics Express, Vol. 27, Issue 5
    • DOI: 10.1364/oe.27.007120

    Multilayer Laue lenses at high x-ray energies: Performance and applications
    text, January 2019

    • Murray, Kevin; Pedersen, Anders F.; Mohacsi, Istvan
    • Deutsches Elektronen-Synchrotron, DESY, Hamburg
    • DOI: 10.3204/pubdb-2019-01243