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Title: In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films

We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.
Authors:
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Publication Date:
Report Number(s):
BNL-114467-2017-JA
Journal ID: ISSN 0003-6951; 138150
Grant/Contract Number:
AC02-06CH11357; SC0012704
Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 111; Journal Issue: 16; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences and Engineering Division; USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; X-rays; Epitaxy; Synchrotrons; Thin films; Radiowave and microwave technology
OSTI Identifier:
1413931
Alternate Identifier(s):
OSTI ID: 1400329; OSTI ID: 1411041

Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., and Eastman, J. A.. In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films. United States: N. p., Web. doi:10.1063/1.4997773.
Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., & Eastman, J. A.. In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films. United States. doi:10.1063/1.4997773.
Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., and Eastman, J. A.. 2017. "In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films". United States. doi:10.1063/1.4997773. https://www.osti.gov/servlets/purl/1413931.
@article{osti_1413931,
title = {In-situ synchrotron x-ray studies of the microstructure and stability of In 2 O 3 epitaxial films},
author = {Highland, M. J. and Hruszkewycz, S. O. and Fong, D. D. and Thompson, Carol and Fuoss, P. H. and Calvo-Almazan, I. and Maddali, S. and Ulvestad, A. and Nazaretski, E. and Huang, X. and Yan, H. and Chu, Y. S. and Zhou, H. and Baldo, P. M. and Eastman, J. A.},
abstractNote = {We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.},
doi = {10.1063/1.4997773},
journal = {Applied Physics Letters},
number = 16,
volume = 111,
place = {United States},
year = {2017},
month = {10}
}