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Title: Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures

The controlled creation of defect centre—nanocavity systems is one of the outstanding challenges for efficiently interfacing spin quantum memories with photons for photon-based entanglement operations in a quantum network. Here we demonstrate direct, maskless creation of atom-like single silicon vacancy (SiV) centres in diamond nanostructures via focused ion beam implantation with ~32 nm lateral precision and <50 nm positioning accuracy relative to a nanocavity. We determine the Si+ ion to SiV centre conversion yield to be ~2.5% and observe a 10-fold conversion yield increase by additional electron irradiation. Low-temperature spectroscopy reveals inhomogeneously broadened ensemble emission linewidths of ~51 GHz and close to lifetime-limited single-emitter transition linewidths down to 126±13 MHz corresponding to ~1.4 times the natural linewidth. Furthermore, this method for the targeted generation of nearly transform-limited quantum emitters should facilitate the development of scalable solid-state quantum information processors.
Authors:
 [1] ;  [2] ;  [2] ;  [2] ; ORCiD logo [2] ;  [2] ; ORCiD logo [3] ;  [3] ;  [4] ; ORCiD logo [3] ;  [5] ;  [5] ;  [5] ;  [3] ;  [2]
  1. Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); Univ. of Copenhagen (Denmark)
  2. Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
  3. Harvard Univ., Cambridge, MA (United States)
  4. Harvard Univ., Cambridge, MA (United States); Russian Quantum Center and P.N. Lebedev Physical Institute, Moscow (Russia)
  5. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
Report Number(s):
SAND2017-11849J
Journal ID: ISSN 2041-1723; 658324
Grant/Contract Number:
AC04-94AL85000
Type:
Accepted Manuscript
Journal Name:
Nature Communications
Additional Journal Information:
Journal Volume: 8; Journal ID: ISSN 2041-1723
Publisher:
Nature Publishing Group
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE
OSTI Identifier:
1411228