Search Menu
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information
Search Scholarly Publications

Title: Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films

Abstract

Lateral subdivision of blanket piezoelectric thin films increases the functional properties through both increased domain wall mobility and declamping of the intrinsic response. This work presents the local effects of substrate declamping on the piezoelectric coefficient d 33,f of 300 nm thick, rhombohedral, {001}‐oriented lead magnesium niobate–lead titanate thin films at the 70/30 composition (70PMN–30PT). Films grown by chemical solution deposition on platinized Si substrates are patterned into strip structures ranging from 0.75 to 9 µm in width. The longitudinal piezoelectric coefficient, d 33,f , is interrogated as a function of position across the patterned structures by three approaches: finite element modeling, piezoresponse force microscopy, and nanoprobe synchrotron X‐ray diffraction. It is found that d 33,f increases from the clamped value of 40–50 to ≈160 pm V −1 at the free sidewall under 200 kV cm −1 excitation. The sidewalls partially declamp the piezoelectric response 500–600 nm into the patterned structure, raising the piezoelectric response at the center of features with lateral dimensions less than 1 µm (3:1 width to thickness aspect ratio). The normalized data from all three methods are in excellent agreement, with quantitative differences providing insight to the field dependence of the piezoelectric coefficient and its declampingmore » behavior.« less

Authors:
 [1];  [2];  [2];  [3];  [3];  [3];  [4];  [2];  [1]
+ Show Author Affiliations
  1. Pennsylvania State Univ., University Park, PA (United States). Dept. of Materials Science and Engineering. Materials Research Inst.
  2. Univ. of Connecticut, Storrs, CT (United States). Dept. of Materials Science and Engineering. Inst. of Materials Science
  3. North Carolina State Univ., Raleigh, NC (United States). Dept. of Materials Science and Engineering
  4. Auburn Univ., AL (United States). Dept. of Physics
Publication Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS); Univ. of Connecticut, Storrs, CT (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1356421
Alternate Identifier(s):
OSTI ID: 1401741
Grant/Contract Number:  
AC02-06CH11357; SC0005037; DE‐SC0005037; DE‐AC02‐06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Advanced Functional Materials
Additional Journal Information:
Journal Volume: 27; Journal Issue: 9; Journal ID: ISSN 1616-301X
Publisher:
Wiley
Country of Publication:
United States
Language:
ENGLISH
Subject:
36 MATERIALS SCIENCE; thin films; lead magnesium niobate–lead titanate; piezoelectric materials; patterning; ferroelectric materials

Citation Formats

Keech, Ryan, Ye, Linghan, Bosse, James L., Esteves, Giovanni, Guerrier, Jonathon, Jones, Jacob L., Kuroda, Marcelo A., Huey, Bryan D., and Trolier‐McKinstry, Susan. Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films. United States: N. p., 2017. Web. doi:10.1002/adfm.201605014.
Copy to clipboard
Keech, Ryan, Ye, Linghan, Bosse, James L., Esteves, Giovanni, Guerrier, Jonathon, Jones, Jacob L., Kuroda, Marcelo A., Huey, Bryan D., & Trolier‐McKinstry, Susan. Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films. United States. https://doi.org/10.1002/adfm.201605014
Copy to clipboard
Keech, Ryan, Ye, Linghan, Bosse, James L., Esteves, Giovanni, Guerrier, Jonathon, Jones, Jacob L., Kuroda, Marcelo A., Huey, Bryan D., and Trolier‐McKinstry, Susan. Wed . "Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films". United States. https://doi.org/10.1002/adfm.201605014. https://www.osti.gov/servlets/purl/1356421.
Copy to clipboard
@article{osti_1356421,
title = {Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films},
author = {Keech, Ryan and Ye, Linghan and Bosse, James L. and Esteves, Giovanni and Guerrier, Jonathon and Jones, Jacob L. and Kuroda, Marcelo A. and Huey, Bryan D. and Trolier‐McKinstry, Susan},
abstractNote = {Lateral subdivision of blanket piezoelectric thin films increases the functional properties through both increased domain wall mobility and declamping of the intrinsic response. This work presents the local effects of substrate declamping on the piezoelectric coefficient d 33,f of 300 nm thick, rhombohedral, {001}‐oriented lead magnesium niobate–lead titanate thin films at the 70/30 composition (70PMN–30PT). Films grown by chemical solution deposition on platinized Si substrates are patterned into strip structures ranging from 0.75 to 9 µm in width. The longitudinal piezoelectric coefficient, d 33,f , is interrogated as a function of position across the patterned structures by three approaches: finite element modeling, piezoresponse force microscopy, and nanoprobe synchrotron X‐ray diffraction. It is found that d 33,f increases from the clamped value of 40–50 to ≈160 pm V −1 at the free sidewall under 200 kV cm −1 excitation. The sidewalls partially declamp the piezoelectric response 500–600 nm into the patterned structure, raising the piezoelectric response at the center of features with lateral dimensions less than 1 µm (3:1 width to thickness aspect ratio). The normalized data from all three methods are in excellent agreement, with quantitative differences providing insight to the field dependence of the piezoelectric coefficient and its declamping behavior.},
doi = {10.1002/adfm.201605014},
journal = {Advanced Functional Materials},
number = 9,
volume = 27,
place = {United States},
year = {Wed Jan 18 00:00:00 EST 2017},
month = {Wed Jan 18 00:00:00 EST 2017}
}
Copy to clipboard
Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1002/adfm.201605014
Copyright Statement
Other availability
Search WorldCat Search WorldCat to find libraries that may hold this journal
Citation Metrics:
Cited by: 23 works
Citation information provided by
Web of Science
Save / Share:
Export Metadata
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.

Works referenced in this record:

Fabrication and characterization of piezoelectric cantilever for micro transducers
journal, January 2006

Etching characteristics of lead magnesium niobate–lead titanate (PMN–PT) relaxor ferroelectrics
journal, September 2000

Processing Optimization of Lead Magnesium Niobate-Lead Titanate 
Thin Films for Piezoelectric MEMS Application
journal, January 2012

Lateral scaling of Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 thin films for piezoelectric logic applications
journal, June 2014

  • Keech, Ryan; Shetty, Smitha; Kuroda, Marcelo A.
  • Journal of Applied Physics, Vol. 115, Issue 23
  • DOI: 10.1063/1.4882025

Phase development and electrical property analysis of pulsed laser deposited Pb(Mg1/3Nb2/3)O3–PbTiO3 (70/30) epitaxial thin films
journal, November 1998

  • Maria, J. -P.; Hackenberger, W.; Trolier-McKinstry, S.
  • Journal of Applied Physics, Vol. 84, Issue 9
  • DOI: 10.1063/1.368809

Management of Lead Content for Growth of {001}-Oriented Lead Magnesium Niobate-Lead Titanate Thin Films
journal, March 2016

  • Keech, Ryan; Shetty, Smitha; Wang, Ke
  • Journal of the American Ceramic Society, Vol. 99, Issue 4
  • DOI: 10.1111/jace.14191

Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si
journal, November 2002

  • Nagarajan, V.; Stanishevsky, A.; Chen, L.
  • Applied Physics Letters, Vol. 81, Issue 22
  • DOI: 10.1063/1.1516857

Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig
journal, July 1999

  • Xu, F.; Chu, F.; Trolier-McKinstry, S.
  • Journal of Applied Physics, Vol. 86, Issue 1
  • DOI: 10.1063/1.370771

Domain wall contributions to the properties of piezoelectric thin films
journal, March 2007

  • Bassiri-Gharb, Nazanin; Fujii, Ichiro; Hong, Eunki
  • Journal of Electroceramics, Vol. 19, Issue 1
  • DOI: 10.1007/s10832-007-9001-1

Size Effects of Epitaxial and Polycrystalline Pb(Zr, Ti)O 3 Thin Films Grown by Metalorganic Chemical Vapor Deposition
journal, September 1999

  • Fujisawa, Hironori; Nakashima, Seiji; Kaibara, Kazuyuki
  • Japanese Journal of Applied Physics, Vol. 38, Issue Part 1, No. 9B
  • DOI: 10.1143/JJAP.38.5392

Characteristics of relaxor-based piezoelectric single crystals for ultrasonic transducers
journal, September 1997

  • Seung-Eek Park, ; Shrout, T. R.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 44, Issue 5
  • DOI: 10.1109/58.655639

Nanostructured Ferroelectrics: Fabrication and Structure-Property Relations
journal, September 2011

Elastic, piezoelectric, and dielectric properties of multidomain 0.67Pb(Mg1/3Nb2/3)O3–0.33PbTiO3 single crystals
journal, October 2001

  • Zhang, Rui; Jiang, Bei; Cao, Wenwu
  • Journal of Applied Physics, Vol. 90, Issue 7
  • DOI: 10.1063/1.1390494

Polarization change in ferroelectric thin film capacitors under external stress
journal, March 2009

  • Zhu, H.; Chu, D. P.; Fleck, N. A.
  • Journal of Applied Physics, Vol. 105, Issue 6
  • DOI: 10.1063/1.3089303

Medical Applications of Piezoelectric Microelectromechanical Systems
journal, January 2013

Chemically prepared Pb(Zr,Ti)O/sub 3/ thin films: the effects of orientation and stress
conference, January 1992

  • Tuttle, B. A.; Voigt, J. A.; Garino, T. J.
  • ISAF '92: Eighth IEEE International Symposium on Applications of Ferroelectrics, ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics
  • DOI: 10.1109/ISAF.1992.300703

Measurement of Internal Stresses via the Polarization in Epitaxial Ferroelectric Films
journal, July 2000

A decade of piezoresponse force microscopy: progress, challenges, and opportunities
journal, December 2006

  • Kalinin, Sergei; Rar, Andrei; Jesse, Stephen
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 53, Issue 12
  • DOI: 10.1109/TUFFC.2006.169

Scaling of ferroelectric properties in thin films
journal, July 1999

  • Ganpule, C. S.; Stanishevsky, A.; Su, Q.
  • Applied Physics Letters, Vol. 75, Issue 3
  • DOI: 10.1063/1.124391

Influence of a Single Grain Boundary on Domain Wall Motion in Ferroelectrics
journal, October 2013

  • Marincel, Daniel M.; Zhang, Huairuo; Kumar, Amit
  • Advanced Functional Materials, Vol. 24, Issue 10
  • DOI: 10.1002/adfm.201302457

Elastic, piezoelectric, and dielectric properties of 0.58Pb(Mg1/3Nb2/3)O3-0.42PbTiO3 single crystal
journal, July 2004

  • Cao, Hu; Schmidt, V. Hugo; Zhang, Rui
  • Journal of Applied Physics, Vol. 96, Issue 1
  • DOI: 10.1063/1.1712020

Fabrication of P b ( Z r , T i ) O 3 Microscopic Capacitors by Electron Beam Lithography
journal, August 1997

  • Hiratani, Masahiko; Okazaki, Choichiro; Hasegawa, Haruhiro
  • Japanese Journal of Applied Physics, Vol. 36, Issue Part 1, No. 8
  • DOI: 10.1143/JJAP.36.5219

Exploring grain size as a cause for “dead-layer” effects in thin film capacitors
journal, July 2002

  • Sinnamon, L. J.; Saad, M. M.; Bowman, R. M.
  • Applied Physics Letters, Vol. 81, Issue 4
  • DOI: 10.1063/1.1494837

The Importance of Distributed Loading and Cantilever Angle in Piezo-Force Microscopy
journal, July 2004

  • Huey, Bryan D.; Ramanujan, Chandra; Bobji, Musuvathi
  • Journal of Electroceramics, Vol. 13, Issue 1-3
  • DOI: 10.1007/s10832-004-5114-y

Intrinsic dead layer effect and the performance of ferroelectric thin film capacitors
journal, September 1997

  • Zhou, C.; Newns, D. M.
  • Journal of Applied Physics, Vol. 82, Issue 6
  • DOI: 10.1063/1.366147

Temperature dependence of the piezoelectric response in lead zirconate titanate films
journal, February 2004

  • Wolf, R. A.; Trolier-McKinstry, S.
  • Journal of Applied Physics, Vol. 95, Issue 3
  • DOI: 10.1063/1.1636530

Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization
journal, April 2008

Quantitative and high spatial resolution d 33 measurement of piezoelectric bulk and thin films
journal, November 2015

  • Shetty, Smitha; Yang, Jung In; Stitt, Joe
  • Journal of Applied Physics, Vol. 118, Issue 17
  • DOI: 10.1063/1.4935140

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size
journal, April 2002

  • Bühlmann, S.; Dwir, B.; Baborowski, J.
  • Applied Physics Letters, Vol. 80, Issue 17
  • DOI: 10.1063/1.1475369

In-situ quantitative analysis of a prostate-specific antigen (PSA) using a nanomechanical PZT cantilever
journal, January 2004

  • Hwang, Kyo Seon; Lee, Jeong Hoon; Park, Jaebum
  • Lab on a Chip, Vol. 4, Issue 6
  • DOI: 10.1039/b410905h

Measurement of piezoelectric coefficients of ferroelectric thin films
journal, August 1994

  • Lefki, K.; Dormans, G. J. M.
  • Journal of Applied Physics, Vol. 76, Issue 3
  • DOI: 10.1063/1.357693

In situ measurement of increased ferroelectric/ferroelastic domain wall motion in declamped tetragonal lead zirconate titanate thin films
journal, February 2015

  • Wallace, M.; Johnson-Wilke, R. L.; Esteves, G.
  • Journal of Applied Physics, Vol. 117, Issue 5
  • DOI: 10.1063/1.4907394

Piezoresponse force microscopy (PFM)
journal, November 2011

Electrode size and boundary condition independent measurement of the effective piezoelectric coefficient of thin films
journal, February 2015

  • Stewart, M.; Lepadatu, S.; McCartney, L. N.
  • APL Materials, Vol. 3, Issue 2
  • DOI: 10.1063/1.4907954

Dynamic behaviour in piezoresponse force microscopy
journal, February 2006

Electromechanical properties of lead zirconate titanate piezoceramics under the influence of mechanical stresses
journal, November 1999

  • Zhang, Q. M.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 46, Issue 6
  • DOI: 10.1109/58.808876

Focused ion-beam patterning of nanoscale ferroelectric capacitors
journal, November 1998

  • Stanishevsky, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6
  • DOI: 10.1116/1.590431

Plasma etch processing of advanced ferroelectric devices
journal, April 1997

  • Cofer, Alferd; Rajora, Paritosh; Deornellas, Steve
  • Integrated Ferroelectrics, Vol. 16, Issue 1-4
  • DOI: 10.1080/10584589708013029

Voltage shift and deformation in the hysteresis loop of Pb(Zr,Ti)O 3 thin film by defects
journal, August 1996

  • Lee, Eun Gu; Wouters, Dirk J.; Willems, Geert
  • Applied Physics Letters, Vol. 69, Issue 9
  • DOI: 10.1063/1.117418

Quantitative analysis of ferroelectric domain imaging with piezoresponse force microscopy
journal, October 2006

  • Jungk, Tobias; Hoffmann, Ákos; Soergel, Elisabeth
  • Applied Physics Letters, Vol. 89, Issue 16
  • DOI: 10.1063/1.2362984

The piezoelectronic transistor: A nanoactuator-based post-CMOS digital switch with high speed and low power
journal, November 2012

  • Newns, D. M.; Elmegreen, B. G.; Liu, X. -H.
  • MRS Bulletin, Vol. 37, Issue 11
  • DOI: 10.1557/mrs.2012.267

Thermal expansion properties of PMN–PT ceramics
journal, August 2008

Non-linear piezoelectric response in lead zirconate-titanate (PZT) films
journal, February 2000

Substrate Clamping Effects on Irreversible Domain Wall Dynamics in Lead Zirconate Titanate Thin Films
journal, April 2012

Piezoelectric properties of 〈001〉 textured Pb(Mg1/3Nb2/3)O3–PbTiO3 ceramics
journal, April 2001

  • Sabolsky, E. M.; James, A. R.; Kwon, S.
  • Applied Physics Letters, Vol. 78, Issue 17
  • DOI: 10.1063/1.1367291

Piezoelectricity in ferroelectric thin films: Domain and stress issues
journal, February 1998

Contribution of substrate to converse piezoelectric response of constrained thin films
journal, October 2004

  • Chen, Lang; Li, J-H.; Slutsker, J.
  • Journal of Materials Research, Vol. 19, Issue 10
  • DOI: 10.1557/JMR.2004.0367

The piezoelectronic stress transduction switch for very large-scale integration, low voltage sensor computation, and radio frequency applications
journal, August 2015

  • Magdău, I. -B.; Liu, X. -H.; Kuroda, M. A.
  • Applied Physics Letters, Vol. 107, Issue 7
  • DOI: 10.1063/1.4928681

Dynamics of ferroelastic domains in ferroelectric thin films
journal, December 2002

  • Nagarajan, V.; Roytburd, A.; Stanishevsky, A.
  • Nature Materials, Vol. 2, Issue 1
  • DOI: 10.1038/nmat800

Effects of Grain Size and Porosity on Electrical and Optical Properties of PLZT Ceramics
journal, February 1973

Label free novel electrical detection using micromachined PZT monolithic thin film cantilever for the detection of C-reactive protein
journal, September 2004

Role of substrate on the dielectric and piezoelectric behavior of epitaxial lead magnesium niobate-lead titanate relaxor thin films
journal, July 2000

  • Nagarajan, V.; Alpay, S. P.; Ganpule, C. S.
  • Applied Physics Letters, Vol. 77, Issue 3
  • DOI: 10.1063/1.127002

Characterization of ferroelectric lead zirconate titanate films by scanning force microscopy
journal, June 1997

  • Zavala, Genaro; Fendler, Janos H.; Trolier-McKinstry, Susan
  • Journal of Applied Physics, Vol. 81, Issue 11
  • DOI: 10.1063/1.365350

Challenges for the determination of piezoelectric constants with piezoresponse force microscopy
journal, December 2007

  • Jungk, Tobias; Hoffmann, Ákos; Soergel, Elisabeth
  • Applied Physics Letters, Vol. 91, Issue 25
  • DOI: 10.1063/1.2827566

Multidimensional SPM applied for nanoscale conductance mapping
journal, December 2013

  • Bosse, James L.; Grishin, Ilja; Kolosov, Oleg V.
  • Journal of Materials Research, Vol. 28, Issue 24
  • DOI: 10.1557/jmr.2013.365
    Sort by:
    [ × clear filter / sort ]

    Works referencing / citing this record:

    Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
    journal, July 2018

    • Hsain, H. Alex; Sharma, Pankaj; Yu, Hyeonggeun
    • Applied Physics Letters, Vol. 113, Issue 2
    • DOI: 10.1063/1.5031134
      Sort by:
      [ × clear filter / sort ]

      Similar Records in DOE PAGES and OSTI.GOV collections: