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This content will become publicly available on March 3, 2018

Title: Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O 2 Discharges by Using a Hybrid Model: Ion Energy and Angular Distribution

Authors:
 [1] ;  [2] ;  [3] ;  [4]
  1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 China, Department of Electrical Engineering and Computer Sciences − 1770, University of California, Berkeley 94720 California
  2. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 China, Research Group PLASMANT, Department of Chemistry, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1 BE-2610 Wilrijk-Antwerp Belgium
  3. Department of Electrical Engineering and Computer Sciences − 1770, University of California, Berkeley 94720 California
  4. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 China
Publication Date:
Grant/Contract Number:
SC000193
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Processes and Polymers
Additional Journal Information:
Journal Volume: 14; Journal Issue: 4-5; Related Information: CHORUS Timestamp: 2017-10-16 01:39:00; Journal ID: ISSN 1612-8850
Publisher:
Wiley Blackwell (John Wiley & Sons)
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
Country of Publication:
Country unknown/Code not available
Language:
English
OSTI Identifier:
1399615