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This content will become publicly available on October 11, 2018

Title: Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6

Authors:
 [1] ;  [2] ;  [3] ;  [3] ;  [1]
  1. Department of Mechanical Engineering, University of Colorado Boulder, 1111 Engineering Dr. UCB 427, Boulder, Colorado 80309
  2. Sandia National Laboratories, 1515 Eubank Blvd SE, MS 0613, Albuquerque, New Mexico 87123
  3. Sandia National Laboratories, 1515 Eubank Blvd SE, MS 0886, Albuquerque, New Mexico 87123
Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 35 Journal Issue: 6; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1399049