Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6

Coyle, Jaclyn; Apblett, Christopher; Brumbach, Michael; Ohlhausen, James; Stoldt, Conrad

doi:10.1116/1.4998726

Title: Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6

Abstract

In this study, the structure and composition of lithium silicate thin films deposited by radio-frequency magnetron cosputtering are investigated. Five compositions ranging from Li2Si2O5 to Li8SiO6 were confirmed by inductively coupled plasma-optical emission spectroscopy, and structural analysis on the evolution of nonbridging oxygens in the thin films was conducted using Fourier transform infrared spectroscopy. It was found that nonbridging oxygens increased as the silicate network breaks apart with the increasing lithium content, which agrees with previous studies on lithium silicates. Thin film impurities were examined using x-ray photoelectron spectroscopy and time of flight secondary ion mass spectroscopy and traced back to target synthesis. This study utilizes a unique synthesis technique for lithium silicate thin films that can be used to model the lithium silicates formed on the surface of silicon anodes in lithium ion batteries and can bridge the understanding between this layer and the influence of silicates on ionic conductivity of the silicon interphase layer.

Authors:: Coyle, Jaclyn; Apblett, Christopher; Brumbach, Michael; Ohlhausen, James; Stoldt, Conrad

Publication Date:: Wed Oct 11 00:00:00 EDT 2017

Sponsoring Org.:: USDOE

OSTI Identifier:: 1399049

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Vacuum Science and Technology A

Additional Journal Information:: Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 35 Journal Issue: 6; Journal ID: ISSN 0734-2101

Publisher:: American Vacuum Society

Country of Publication:: United States

Language:: English

Citation Formats


                    Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, and Stoldt, Conrad. Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6.  United States: N. p., 2017. 
Web.  doi:10.1116/1.4998726.

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                    Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, & Stoldt, Conrad. Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6.  United States.  https://doi.org/10.1116/1.4998726

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                    Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, and Stoldt, Conrad. Wed .  
"Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6".  United States.  https://doi.org/10.1116/1.4998726.

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@article{osti_1399049,

  title        = {Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6},

  author       = {Coyle, Jaclyn and Apblett, Christopher and Brumbach, Michael and Ohlhausen, James and Stoldt, Conrad},

  abstractNote = {In this study, the structure and composition of lithium silicate thin films deposited by radio-frequency magnetron cosputtering are investigated. Five compositions ranging from Li2Si2O5 to Li8SiO6 were confirmed by inductively coupled plasma-optical emission spectroscopy, and structural analysis on the evolution of nonbridging oxygens in the thin films was conducted using Fourier transform infrared spectroscopy. It was found that nonbridging oxygens increased as the silicate network breaks apart with the increasing lithium content, which agrees with previous studies on lithium silicates. Thin film impurities were examined using x-ray photoelectron spectroscopy and time of flight secondary ion mass spectroscopy and traced back to target synthesis. This study utilizes a unique synthesis technique for lithium silicate thin films that can be used to model the lithium silicates formed on the surface of silicon anodes in lithium ion batteries and can bridge the understanding between this layer and the influence of silicates on ionic conductivity of the silicon interphase layer.},

  doi          = {10.1116/1.4998726},

  journal      = {Journal of Vacuum Science and Technology A},

  number       = 6,

  volume       = 35,

  place        = {United States},

  year         = {Wed Oct 11 00:00:00 EDT 2017},

  month        = {Wed Oct 11 00:00:00 EDT 2017}

}

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Title: Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li2Si2O5 to lithium-rich Li8SiO6

Abstract

Citation Formats

Correlation between irreversible capacity and electrolyte solvents degradation probed by NMR in Si-based negative electrode of Li-ion cell journal, August 2013

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Correlation between irreversible capacity and electrolyte solvents degradation probed by NMR in Si-based negative electrode of Li-ion cell
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journal, March 1993

Molecular dynamics simulation of Li4SiO4 melt and glass
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Crystallization of Lithium Disilicate Glass Using Microwave Processing
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In Situ Study of Silicon Electrode Lithiation with X-ray Reflectivity
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journal, October 1983

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journal, February 2010

Challenges in the development of advanced Li-ion batteries: a review
journal, January 2011

Sol-gel processing of lithium disilicate
journal, December 1995

Role of Surface Oxides in the Formation of Solid–Electrolyte Interphases at Silicon Electrodes for Lithium-Ion Batteries
journal, November 2014

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journal, January 2011

25th Anniversary Article: Understanding the Lithiation of Silicon and Other Alloying Anodes for Lithium-Ion Batteries
journal, August 2013

Morphology-controllable Li ₂ SiO ₃ nanostructures
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Ex situ XRD, TEM, IR, Raman and NMR spectroscopy of crystallization of lithium disilicate glass at high pressure
journal, October 2006

Li-alloy based anode materials for Li secondary batteries
journal, January 2010

Amorphous phase separation and crystallization in a lithium silicate glass prepared by the sol-gel method
journal, March 1988

Pressure and temperature stability range of crystalline lithium metasilicate in a binary Li2O·2SiO2 glass
journal, August 2013

Raman and Infrared Spectral Studies of Anhydrous Li ₂ CO ₃ and Na ₂ CO ₃
journal, June 1971

Vibrational spectroscopic and X-ray diffraction study of crystalline phases in the Li2O-SiO2 system
journal, March 2014

Assignment of the vibrational spectra of lithium hydroxide monohydrate, LiOH·H ₂ O
journal, February 2011

Rechargeability of Li–air cathodes pre-filled with discharge products using an ether-based electrolyte solution: implications for cycle-life of Li–air cells
journal, January 2013

Effect of oxide layer thickness to nano–Si anode for Li-ion batteries
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Property Evolution of Al ₂ O ₃ Coated and Uncoated Si Electrodes: A First Principles Investigation
journal, January 2014

The Effects of Native Oxide Surface Layer on the Electrochemical Performance of Si Nanoparticle-Based Electrodes
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Enhanced CO₂absorption kinetics in lithium silicate platelets synthesized by a sol–gel approach
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Identification of Li–O absorption bands based on lithium isotope substitutions
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