Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion
Abstract
The growth of carbon nanotubes (CNTs) on polycrystalline silicon substrates was studied to improve the design of CNT field emission sources for microelectromechanical systems (MEMS) applications and vacuum microelectronic devices (VMDs). Microwave plasma-enhanced chemical vapor deposition (PECVD) was used for CNT growth, resulting in CNTs that incorporate the catalyst particle at their base. The kinetics of CNT growth on polysilicon were compared to growth on Si (100) using the model of Deal and Grove, finding activation energies of 1.61 and 1.54 eV for the nucleation phase of growth and 1.90 and 3.69 eV for the diffusion-limited phase on Si (100) and polysilicon, respectively. Diffusivity values for growth on polysilicon were notably lower than the corresponding values on Si (100) and the growth process became diffusion-limited earlier. Evidence favors a surface diffusion growth mechanism involving diffusion of carbon precursor species along the length of the CNT forest to the catalyst at the base. Explanations for the differences in activation energies and diffusivities were elucidated by SEM analysis of the catalyst nanoparticle arrays and through wide-angle X-ray scattering (WAXS) of CNT forests. As a result, methods are presented to improve adhesion of CNT films during operation as field emitters, resulting in amore »
- Authors:
-
[1];
[1];
- Duke Univ., Durham, NC (United States)
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Research Triangle Institute (RTI) International, Durham, NC (United States)
- Publication Date:
- Research Org.:
- Duke Univ., Durham, NC (United States)
- Sponsoring Org.:
- USDOE Advanced Research Projects Agency - Energy (ARPA-E); USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1332934
- Alternate Identifier(s):
- OSTI ID: 1398682
- Grant/Contract Number:
- AR0000546; AC52-07NA27344
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Carbon
- Additional Journal Information:
- Journal Name: Carbon; Journal ID: ISSN 0008-6223
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE
Citation Formats
Ubnoske, Stephen M., Radauscher, Erich J., Meshot, Eric R., Stoner, Brian R., Parker, Charles B., and Glass, Jeffrey T. Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion. United States: N. p., 2016.
Web. doi:10.1016/j.carbon.2016.11.047.
Ubnoske, Stephen M., Radauscher, Erich J., Meshot, Eric R., Stoner, Brian R., Parker, Charles B., & Glass, Jeffrey T. Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion. United States. https://doi.org/10.1016/j.carbon.2016.11.047
Ubnoske, Stephen M., Radauscher, Erich J., Meshot, Eric R., Stoner, Brian R., Parker, Charles B., and Glass, Jeffrey T. Sat .
"Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion". United States. https://doi.org/10.1016/j.carbon.2016.11.047. https://www.osti.gov/servlets/purl/1332934.
@article{osti_1332934,
title = {Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion},
author = {Ubnoske, Stephen M. and Radauscher, Erich J. and Meshot, Eric R. and Stoner, Brian R. and Parker, Charles B. and Glass, Jeffrey T.},
abstractNote = {The growth of carbon nanotubes (CNTs) on polycrystalline silicon substrates was studied to improve the design of CNT field emission sources for microelectromechanical systems (MEMS) applications and vacuum microelectronic devices (VMDs). Microwave plasma-enhanced chemical vapor deposition (PECVD) was used for CNT growth, resulting in CNTs that incorporate the catalyst particle at their base. The kinetics of CNT growth on polysilicon were compared to growth on Si (100) using the model of Deal and Grove, finding activation energies of 1.61 and 1.54 eV for the nucleation phase of growth and 1.90 and 3.69 eV for the diffusion-limited phase on Si (100) and polysilicon, respectively. Diffusivity values for growth on polysilicon were notably lower than the corresponding values on Si (100) and the growth process became diffusion-limited earlier. Evidence favors a surface diffusion growth mechanism involving diffusion of carbon precursor species along the length of the CNT forest to the catalyst at the base. Explanations for the differences in activation energies and diffusivities were elucidated by SEM analysis of the catalyst nanoparticle arrays and through wide-angle X-ray scattering (WAXS) of CNT forests. As a result, methods are presented to improve adhesion of CNT films during operation as field emitters, resulting in a 2.5× improvement.},
doi = {10.1016/j.carbon.2016.11.047},
journal = {Carbon},
number = ,
volume = ,
place = {United States},
year = {Sat Nov 19 00:00:00 EST 2016},
month = {Sat Nov 19 00:00:00 EST 2016}
}
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Works referenced in this record:
A Thin‐Film Field‐Emission Cathode
journal, June 1968
- Spindt, C. A.
- Journal of Applied Physics, Vol. 39, Issue 7
Field-emitter arrays for vacuum microelectronics
journal, January 1991
- Spindt, C. A.; Holland, C. E.; Rosengreen, A.
- IEEE Transactions on Electron Devices, Vol. 38, Issue 10
Physical considerations in vacuum microelectronics devices
journal, November 1989
- Brodi, I.
- IEEE Transactions on Electron Devices, Vol. 36, Issue 11
Vacuum microelectronics: what's new and exciting
journal, January 1991
- Utsumi, T.
- IEEE Transactions on Electron Devices, Vol. 38, Issue 10
The device made of nothing
journal, July 2014
- Han, Jin-woo; Meyyappan, Meyya
- IEEE Spectrum, Vol. 51, Issue 7
Nothing is like a vacuum
journal, August 2012
- Stoner, Brian R.; Glass, Jeffrey T.
- Nature Nanotechnology, Vol. 7, Issue 8
High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices
journal, June 2008
- Natarajan, Srividya; Parker, Charles B.; Glass, Jeffrey T.
- Applied Physics Letters, Vol. 92, Issue 22
Chemical Ionization Mass Spectrometry Using Carbon Nanotube Field Emission Electron Sources
journal, July 2015
- Radauscher, Erich J.; Keil, Adam D.; Wells, Mitch
- Journal of The American Society for Mass Spectrometry, Vol. 26, Issue 11
Formation of filamentous carbon from iron, cobalt and chromium catalyzed decomposition of acetylene
journal, July 1973
- Baker, R.
- Journal of Catalysis, Vol. 30, Issue 1
Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition
journal, November 2001
- Chhowalla, M.; Teo, K. B. K.; Ducati, C.
- Journal of Applied Physics, Vol. 90, Issue 10
Effects of catalyst film thickness on plasma-enhanced carbon nanotube growth
journal, August 2005
- Hofmann, S.; Cantoro, M.; Kleinsorge, B.
- Journal of Applied Physics, Vol. 98, Issue 3
Temperature-Dependent Growth of Vertically Aligned Carbon Nanotubes in the Range 800−1100 °C
journal, August 2002
- Lee, Yun Tack; Park, Jeunghee; Choi, Young Sang
- The Journal of Physical Chemistry B, Vol. 106, Issue 31
Investigation on the temperature-dependent growth rate of carbon nanotubes using chemical vapor deposition of ferrocene and acetylene
journal, January 2005
- Kim, Ki-Eun; Kim, Kang-Jin; Jung, Woo Sung
- Chemical Physics Letters, Vol. 401, Issue 4-6
A growth mark method for studying growth mechanism of carbon nanotube arrays
journal, November 2005
- Liu, Kai; Jiang, Kaili; Feng, Chen
- Carbon, Vol. 43, Issue 14
In situ measurements and modeling of carbon nanotube array growth kinetics during chemical vapor deposition
journal, July 2005
- Puretzky, A. A.; Geohegan, D. B.; Jesse, S.
- Applied Physics A, Vol. 81, Issue 2
Kinetic critical temperature and optimized chemical vapor deposition growth of carbon nanotubes
journal, February 2009
- Vinten, P.; Lefebvre, J.; Finnie, P.
- Chemical Physics Letters, Vol. 469, Issue 4-6
The growth of carbon nanotube stacks in the kinetics-controlled regime
journal, February 2007
- Zhu, Lingbo; Xu, Jianwen; Xiao, Fei
- Carbon, Vol. 45, Issue 2
Low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition
journal, July 2003
- Hofmann, S.; Ducati, C.; Robertson, J.
- Applied Physics Letters, Vol. 83, Issue 1
Millimeter-Thick Single-Walled Carbon Nanotube Forests: Hidden Role of Catalyst Support
journal, April 2007
- Noda, Suguru; Hasegawa, Kei; Sugime, Hisashi
- Japanese Journal of Applied Physics, Vol. 46, Issue No. 17
Real-time imaging of vertically aligned carbon nanotube array growth kinetics
journal, January 2008
- Puretzky, A. A.; Eres, G.; Rouleau, C. M.
- Nanotechnology, Vol. 19, Issue 5
Monitoring Carbon Nanotube Growth by Formation of Nanotube Stacks and Investigation of the Diffusion-Controlled Kinetics
journal, February 2006
- Zhu, Lingbo; Hess, Dennis W.; Wong, Ching-Ping
- The Journal of Physical Chemistry B, Vol. 110, Issue 11
Diffusion- and Reaction-Limited Growth of Carbon Nanotube Forests
journal, October 2009
- Wirth, Christoph Tobias; Zhang, Can; Zhong, Guofang
- ACS Nano, Vol. 3, Issue 11
Transport-kinetical phenomena in nanotube growth
journal, April 2002
- Louchev, Oleg A.
- Journal of Crystal Growth, Vol. 237-239
Diffusion-controlled kinetics of carbon nanotube forest growth by chemical vapor deposition
journal, January 2003
- Louchev, Oleg A.; Laude, Thomas; Sato, Yoichiro
- The Journal of Chemical Physics, Vol. 118, Issue 16
Effect of sputtered Cu film’s diffusion barrier on the growth and field emission properties of carbon nanotubes by chemical vapor deposition
journal, November 2007
- Wang, Lili; Chen, Ting; Feng, Tao
- Applied Physics A, Vol. 90, Issue 4
Effect of titanium interlayer on the microstructure and electron emission characteristics of multiwalled carbon nanotubes
journal, August 2011
- Sharma, Himani; Shukla, A. K.; Vankar, V. D.
- Journal of Applied Physics, Vol. 110, Issue 3
Efficient diffusion barrier layers for the catalytic growth of carbon nanotubes on copper substrates
journal, March 2009
- García-Céspedes, J.; Thomasson, S.; Teo, K. B. K.
- Carbon, Vol. 47, Issue 3
Graphenated carbon nanotubes for enhanced electrochemical double layer capacitor performance
journal, October 2011
- Stoner, Brian R.; Raut, Akshay S.; Brown, Billyde
- Applied Physics Letters, Vol. 99, Issue 18
Three-dimensional arrays of graphenated carbon nanotubes
journal, March 2012
- Parker, Charles B.; Raut, Akshay S.; Brown, Billyde
- Journal of Materials Research, Vol. 27, Issue 7
Perspectives on the Growth of High Edge Density Carbon Nanostructures: Transitions from Vertically Oriented Graphene Nanosheets to Graphenated Carbon Nanotubes
journal, July 2014
- Ubnoske, Stephen M.; Raut, Akshay S.; Brown, Billyde
- The Journal of Physical Chemistry C, Vol. 118, Issue 29
Role of nanocrystalline domain size on the electrochemical double-layer capacitance of high edge density carbon nanostructures
journal, June 2015
- Ubnoske, Stephen M.; Raut, Akshay S.; Parker, Charles B.
- MRS Communications, Vol. 5, Issue 2
Protocol for High-Sensitivity Surface Area Measurements of Nanostructured Films Enabled by Atomic Layer Deposition of TiO 2
journal, November 2015
- Ubnoske, Stephen M.; Peng, Qing; Meshot, Eric R.
- The Journal of Physical Chemistry C, Vol. 119, Issue 46
Growth of vertically aligned bamboo-like carbon nanotubes from ammonia/methane precursors using a platinum catalyst
journal, January 2011
- Brown, Billyde; Parker, Charles B.; Stoner, Brian R.
- Carbon, Vol. 49, Issue 1
Shape-engineerable and highly densely packed single-walled carbon nanotubes and their application as super-capacitor electrodes
journal, November 2006
- Futaba, Don N.; Hata, Kenji; Yamada, Takeo
- Nature Materials, Vol. 5, Issue 12
Adhesion test of Carbon Nanotube film Coated onto Transparent Conducting Substrates
journal, June 2010
- Lee, Sang Won; Kim, Ki Kang; Cui, Yan
- Nano, Vol. 05, Issue 03
V. On liquid diffusion
journal, July 1855
- Fick, Adolph
- The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, Vol. 10, Issue 63
General Relationship for the Thermal Oxidation of Silicon
journal, December 1965
- Deal, B. E.; Grove, A. S.
- Journal of Applied Physics, Vol. 36, Issue 12
In situ growth rate measurements and length control during chemical vapor deposition of vertically aligned multiwall carbon nanotubes
journal, September 2003
- Geohegan, D. B.; Puretzky, A. A.; Ivanov, I. N.
- Applied Physics Letters, Vol. 83, Issue 9
Mechanism and Kinetics of Growth Termination in Controlled Chemical Vapor Deposition Growth of Multiwall Carbon Nanotube Arrays
journal, February 2009
- Stadermann, Michael; Sherlock, Sarah P.; In, Jung-Bin
- Nano Letters, Vol. 9, Issue 2
Collective Mechanism for the Evolution and Self-Termination of Vertically Aligned Carbon Nanotube Growth
journal, October 2009
- Bedewy, Mostafa; Meshot, Eric R.; Guo, Haicheng
- The Journal of Physical Chemistry C, Vol. 113, Issue 48
The Roles of Ordinary and Soret Diffusion in the Metal-Catalyzed Formation of Filamentous Carbon
journal, March 1995
- Holstein, W. L.
- Journal of Catalysis, Vol. 152, Issue 1
SYMPOSIUM ON FLOW THROUGH POROUS MEDIA Diffusion and Flow of Gases in Porous Solids
journal, August 1970
- Youngquist, Gordon R.
- Industrial & Engineering Chemistry, Vol. 62, Issue 8
Diffusion of ideal gases in capillaries and porous solids
journal, March 1962
- Scott, D. S.; Dullien, F. A. L.
- AIChE Journal, Vol. 8, Issue 1
Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition
journal, November 2000
- Cui, H.; Zhou, O.; Stoner, B. R.
- Journal of Applied Physics, Vol. 88, Issue 10
Mechanisms of carbon formation on nickel-containing catalysts
journal, June 1977
- Rostrupnielsen, J.
- Journal of Catalysis, Vol. 48, Issue 1-3
Further studies of the formation of filamentous carbon from the interaction of supported iron particles with acetylene
journal, January 1987
- Baker, R. T. K.; Chludzinski, J. J.; Lund, C. R. F.
- Carbon, Vol. 25, Issue 2
Raman Spectrum of Graphite
journal, August 1970
- Tuinstra, F.; Koenig, J. L.
- The Journal of Chemical Physics, Vol. 53, Issue 3
Origin of dispersive effects of the Raman D band in carbon materials
journal, March 1999
- Matthews, M. J.; Pimenta, M. A.; Dresselhaus, G.
- Physical Review B, Vol. 59, Issue 10
Catalytic Growth of Single-Wall Carbon Nanotubes: An Ab Initio Study
journal, March 1997
- Lee, Young Hee; Kim, Seong Gon; Tománek, David
- Physical Review Letters, Vol. 78, Issue 12
Enhanced electron transfer kinetics through hybrid graphene-carbon nanotube films
journal, November 2014
- Henry, Philémon A.; Raut, Akshay S.; Ubnoske, Stephen M.
- Electrochemistry Communications, Vol. 48
Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition
journal, April 2000
- Choi, Young Chul; Shin, Young Min; Lee, Young Hee
- Applied Physics Letters, Vol. 76, Issue 17
Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass
journal, November 1998
- Ren, Z. F.
- Science, Vol. 282, Issue 5391
Effects of the electrical conductivity and orientation of silicon substrate on the synthesis of multi-walled carbon nanotubes by thermal chemical vapor deposition
journal, January 2013
- Choi, Hyonkwang; Gong, Jaeseok; Lim, Yeongjin
- Nanoscale Research Letters, Vol. 8, Issue 1
Effect of nickel, iron and cobalt on growth of aligned carbon nanotubes
journal, March 2002
- Huang, Z. P.; Wang, D. Z.; Wen, J. G.
- Applied Physics A: Materials Science & Processing, Vol. 74, Issue 3
Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition
journal, October 2000
- Bower, Chris; Zhou, Otto; Zhu, Wei
- Applied Physics Letters, Vol. 77, Issue 17
Diameter-dependent kinetics of activation and deactivation in carbon nanotube population growth
journal, November 2012
- Bedewy, Mostafa; Meshot, Eric R.; Hart, A. John
- Carbon, Vol. 50, Issue 14
Mechanical coupling limits the density and quality of self-organized carbon nanotube growth
journal, January 2013
- Bedewy, Mostafa; Hart, A. John
- Nanoscale, Vol. 5, Issue 7
Population Growth Dynamics of Carbon Nanotubes
journal, October 2011
- Bedewy, Mostafa; Meshot, Eric R.; Reinker, Michael J.
- ACS Nano, Vol. 5, Issue 11
Measuring the lengthening kinetics of aligned nanostructures by spatiotemporal correlation of height and orientation
journal, January 2010
- Meshot, Eric R.; Bedewy, Mostafa; Lyons, Kevin M.
- Nanoscale, Vol. 2, Issue 6
Lifetime and Failure Mechanisms of an Arrayed Carbon Nanotube Field Emission Cathode
journal, November 2010
- Williams, Logan T.; Kumsomboone, Victor S.; Ready, W. Jud
- IEEE Transactions on Electron Devices, Vol. 57, Issue 11
Degradation and failure of carbon nanotube field emitters
journal, March 2003
- Bonard, Jean-Marc; Klinke, Christian; Dean, Kenneth A.
- Physical Review B, Vol. 67, Issue 11
Degradation and Failure of Field Emitting Carbon Nanotube Arrays
journal, May 2011
- Mahapatra, D. Roy; Sinha, N.; Melnik, R. V. N.
- Journal of Nanoscience and Nanotechnology, Vol. 11, Issue 5
Multishell conduction in multiwalled carbon nanotubes
journal, March 2002
- Collins, P. G.; Avouris, Ph.
- Applied Physics A: Materials Science & Processing, Vol. 74, Issue 3
Irradiation Damage Determined Field Emission of Ion Irradiated Carbon Nanotubes
journal, March 2014
- Deng, Jian-Hua; Hou, Xing-Gang; Cheng, Lin
- ACS Applied Materials & Interfaces, Vol. 6, Issue 7
Degradation of a carbon nanotube-based field-emission cathode during ion sputtering
journal, July 2012
- Bocharov, G. S.; Eletskii, A. V.
- Technical Physics, Vol. 57, Issue 7
A thin film triode type carbon nanotube field emission cathode
journal, October 2012
- Sanborn, Graham; Turano, Stephan; Collins, Peter
- Applied Physics A, Vol. 110, Issue 1
Interface control: A modified rooting technique for enhancing field emission from multiwall carbon nanotube based bulk emitters
journal, August 2011
- Lahiri, Indranil; Choi, Wonbong
- Acta Materialia, Vol. 59, Issue 14
Interface characteristics of vertically aligned carbon nanofibers for interconnect applications
journal, December 2006
- Ominami, Yusuke; Ngo, Quoc; Suzuki, Makoto
- Applied Physics Letters, Vol. 89, Issue 26
A strategy for forming robust adhesion with the substrate in a carbon-nanotube field-emission array
journal, November 2006
- Lim, Seong Chu; Choi, Ha Kyu; Jeong, Hee Jin
- Carbon, Vol. 44, Issue 13
Works referencing / citing this record:
Catalytic synthesis of SiC nanowires in an open system
journal, January 2019
- Kao, Kechen; Jiang, Min; Ding, Lijuan
- Journal of the American Ceramic Society, Vol. 102, Issue 6
Micro-Nano Carbon Structures with Platelet, Glassy and Tube-Like Morphologies
journal, August 2019
- Liu,
- Nanomaterials, Vol. 9, Issue 9