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Title: Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry

Authors:
 [1];  [2]; ORCiD logo [3];  [4]; ORCiD logo [4]
  1. Department of Chemical Engineering, University of Washington, Seattle, Washington 98195, United States
  2. Department of Chemistry, University of Washington, Seattle, Washington 98195, United States
  3. Department of Chemical Engineering, University of Washington, Seattle, Washington 98195, United States, Department of Chemistry, University of Washington, Seattle, Washington 98195, United States
  4. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, United States
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States); Univ. of Minnesota, Minneapolis, MN (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1398132
Alternate Identifier(s):
OSTI ID: 1411036; OSTI ID: 1414910; OSTI ID: 1507564
Grant/Contract Number:  
[SC0012702; AC02-06CH11357]
Resource Type:
Published Article
Journal Name:
Chemistry of Materials
Additional Journal Information:
[Journal Name: Chemistry of Materials Journal Volume: 29 Journal Issue: 20]; Journal ID: ISSN 0897-4756
Publisher:
American Chemical Society
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Lownsbury, James M., Gladden, James A., Campbell, Charles T., Kim, In Soo, and Martinson, Alex B. F. Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry. United States: N. p., 2017. Web. doi:10.1021/acs.chemmater.7b01491.
Lownsbury, James M., Gladden, James A., Campbell, Charles T., Kim, In Soo, & Martinson, Alex B. F. Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry. United States. doi:10.1021/acs.chemmater.7b01491.
Lownsbury, James M., Gladden, James A., Campbell, Charles T., Kim, In Soo, and Martinson, Alex B. F. Thu . "Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry". United States. doi:10.1021/acs.chemmater.7b01491.
@article{osti_1398132,
title = {Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry},
author = {Lownsbury, James M. and Gladden, James A. and Campbell, Charles T. and Kim, In Soo and Martinson, Alex B. F.},
abstractNote = {},
doi = {10.1021/acs.chemmater.7b01491},
journal = {Chemistry of Materials},
number = [20],
volume = [29],
place = {United States},
year = {2017},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1021/acs.chemmater.7b01491

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