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Title: Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode

Authors:
; ; ; ORCiD logo ;
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Surface and Coatings Technology
Additional Journal Information:
Journal Volume: 314; Journal Issue: C; Related Information: CHORUS Timestamp: 2017-10-04 16:26:53; Journal ID: ISSN 0257-8972
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1397041