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Title: Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode

Authors:
; ; ; ORCiD logo ;
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Surface and Coatings Technology
Additional Journal Information:
Journal Volume: 314; Journal Issue: C; Related Information: CHORUS Timestamp: 2018-09-09 06:23:55; Journal ID: ISSN 0257-8972
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1397041

Ferreira, Fábio, Sousa, Cláudio, Cavaleiro, Albano, Anders, André, and Oliveira, João. Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode. Netherlands: N. p., Web. doi:10.1016/j.surfcoat.2016.08.017.
Ferreira, Fábio, Sousa, Cláudio, Cavaleiro, Albano, Anders, André, & Oliveira, João. Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode. Netherlands. doi:10.1016/j.surfcoat.2016.08.017.
Ferreira, Fábio, Sousa, Cláudio, Cavaleiro, Albano, Anders, André, and Oliveira, João. 2017. "Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode". Netherlands. doi:10.1016/j.surfcoat.2016.08.017.
@article{osti_1397041,
title = {Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode},
author = {Ferreira, Fábio and Sousa, Cláudio and Cavaleiro, Albano and Anders, André and Oliveira, João},
abstractNote = {},
doi = {10.1016/j.surfcoat.2016.08.017},
journal = {Surface and Coatings Technology},
number = C,
volume = 314,
place = {Netherlands},
year = {2017},
month = {3}
}