Ion irradiation induced structural modifications and increase in elastic modulus of silica based thin films

Shojaee, S. A.; Qi, Y.; Wang, Y. Q.; Mehner, A.; Lucca, D. A.

doi:10.1038/srep40100

Title: Ion irradiation induced structural modifications and increase in elastic modulus of silica based thin films

Journal Article · 10 January 2017 · Scientific Reports

DOI: https://doi.org/10.1038/srep40100 · OSTI ID:1396137

Shojaee, S. A. ^[1]; Qi, Y. ^[1];

^[2]; Mehner, A. ^[3]; Lucca, D. A. ^[1]

Oklahoma State Univ., Stillwater, OK (United States). School of Mechanical and Aerospace Engineering
Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Science and Technology Division
Foundation Inst. of Materials Engineering, Bremen (Germany)

Ion irradiation is an alternative to heat treatment for transforming organic-inorganic thin films to a ceramic state. One major shortcoming in previous studies of ion-irradiated films is the assumption that constituent phases in ion-irradiated and heat-treated films are identical and that the ion irradiation effect is limited to changes in composition. Here, we investigate the effects of ion irradiation on both the composition and structure of constituent phases and use the results to explain the measured elastic modulus of the films. Our results indicated that the microstructure of the irradiated films consisted of carbon clusters within a silica matrix. It was found that carbon was present in a non-graphitic sp²-bonded configuration. It was also observed that ion irradiation caused a decrease in the Si-O-Si bond angle of silica, similar to the effects of applied pressure. A phase transformation from tetrahedrally bonded to octahedrally bonded silica was also observed. The results indicated the incorporation of carbon within the silica network. Finally, a combination of the decrease in Si-O-Si bond angle and an increase in the carbon incorporation within the silica network was found to be responsible for the increase in the elastic modulus of the films.

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Research Organization:: Los Alamos National Lab. (LANL), Los Alamos, NM (United States)

Sponsoring Organization:: USDOE Office of Science (SC). Basic Energy Sciences (BES) (SC-22); USDOE National Nuclear Security Administration (NNSA); National Science Foundation (NSF)

Grant/Contract Number:: AC52-06NA25396

OSTI ID:: 1396137

Report Number(s):: LA-UR--17-27527

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Vol. 7; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Mechanical Response of He-Implanted Amorphous SiOC/Crystalline Fe Nanolaminates Zare, A.; Su, Q.; Gigax, J. Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-41226-w	journal	March 2019

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