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This content will become publicly available on September 29, 2018

Title: Surface band bending and interface alignment of plasma-enhanced atomic layer deposited SiO 2 on Al x Ga 1-x N

Authors:
 [1] ;  [1]
  1. Department of Physics, Arizona State University, Tempe, AZ 85287-1504, USA
Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 122; Journal Issue: 12; Related Information: CHORUS Timestamp: 2018-02-14 14:22:18; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
Country of Publication:
United States
Language:
English
OSTI Identifier:
1395588