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This content will become publicly available on August 9, 2018

Title: Building with ions: towards direct write of platinum nanostructures using in situ liquid cell helium ion microscopy

Direct write with liquid precursor using an helium ion beam, allows fabrication of nanostructures with sub-15 nm resolution and high chemical purity.
Authors:
ORCiD logo [1] ; ORCiD logo [1] ;  [1] ;  [2] ;  [1] ;  [3] ; ORCiD logo [1] ;  [1] ; ORCiD logo [1] ;  [1]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Univ. of Tennessee, Knoxville, TN (United States); The Proctor and Gamble Company Winton Hill Business Center, Cincinnati, OH (United States)
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Univ. of Tennessee, Knoxville, TN (United States)
Publication Date:
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Nanoscale
Additional Journal Information:
Journal Volume: 9; Journal Issue: 35; Journal ID: ISSN 2040-3364
Publisher:
Royal Society of Chemistry
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY
OSTI Identifier:
1394460