skip to main content

DOE PAGESDOE PAGES

This content will become publicly available on September 19, 2018

Title: Spontaneous formation of highly periodic nano-ripples in inclined deposition of Mo/Si multilayers

Authors:
 [1] ;  [2] ;  [2] ;  [1]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  2. Fraunhofer Institute for Material and Beam Technology, Winterbergstraße 28, 01277 Dresden, Germany
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 122; Journal Issue: 11; Related Information: CHORUS Timestamp: 2018-02-14 20:20:41; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1392731