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Title: A novel polyimide based micro heater with high temperature uniformity

MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this study, we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as a simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. Finally, this design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.
 [1] ;  [2] ;  [3] ;  [1]
  1. Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)
  2. Stony Brook Univ., NY (United States)
  3. Brookhaven National Lab. (BNL), Upton, NY (United States)
Publication Date:
Report Number(s):
Journal ID: ISSN 0924-4247; KC0403020
Grant/Contract Number:
SC0012704; IDBR-1530508
Accepted Manuscript
Journal Name:
Sensors and Actuators. A, Physical
Additional Journal Information:
Journal Volume: 257; Journal ID: ISSN 0924-4247
Research Org:
Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States); Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); National Science Foundation (NSF); AbbVie Inc. (United States)
Country of Publication:
United States
42 ENGINEERING; Micro heater; Bio-calorimetry; Temperature uniformity; Polyimide membrane; Fast response; Center for Functional Nanomaterials
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1412563