A novel polyimide based micro heater with high temperature uniformity
Abstract
MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this study, we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as a simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. Finally, this design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.
- Authors:
-
- Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)
- Stony Brook Univ., NY (United States)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Publication Date:
- Research Org.:
- Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); AbbVie Inc. (United States)
- OSTI Identifier:
- 1392269
- Alternate Identifier(s):
- OSTI ID: 1412563
- Report Number(s):
- BNL-114325-2017-JA
Journal ID: ISSN 0924-4247; KC0403020
- Grant/Contract Number:
- SC0012704; IDBR-1530508; AC02-98CH10886
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Sensors and Actuators. A, Physical
- Additional Journal Information:
- Journal Volume: 257; Journal ID: ISSN 0924-4247
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; Micro heater; Bio-calorimetry; Temperature uniformity; Polyimide membrane; Fast response; Center for Functional Nanomaterials
Citation Formats
Yu, Shifeng, Wang, Shuyu, Lu, Ming, and Zuo, Lei. A novel polyimide based micro heater with high temperature uniformity. United States: N. p., 2017.
Web. doi:10.1016/j.sna.2017.02.006.
Yu, Shifeng, Wang, Shuyu, Lu, Ming, & Zuo, Lei. A novel polyimide based micro heater with high temperature uniformity. United States. https://doi.org/10.1016/j.sna.2017.02.006
Yu, Shifeng, Wang, Shuyu, Lu, Ming, and Zuo, Lei. Mon .
"A novel polyimide based micro heater with high temperature uniformity". United States. https://doi.org/10.1016/j.sna.2017.02.006. https://www.osti.gov/servlets/purl/1392269.
@article{osti_1392269,
title = {A novel polyimide based micro heater with high temperature uniformity},
author = {Yu, Shifeng and Wang, Shuyu and Lu, Ming and Zuo, Lei},
abstractNote = {MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this study, we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as a simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. Finally, this design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.},
doi = {10.1016/j.sna.2017.02.006},
journal = {Sensors and Actuators. A, Physical},
number = ,
volume = 257,
place = {United States},
year = {Mon Feb 06 00:00:00 EST 2017},
month = {Mon Feb 06 00:00:00 EST 2017}
}
Web of Science
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