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Title: Impact of B 4C co-sputtering on structure and optical performance of Cr/Sc multilayer X-ray mirrors

We investigate the influence of B 4C incorporation during magnetron sputter deposition of Cr/Sc multilayers intended for soft X-ray reflective optics. Chemical analysis suggests formation of metal: boride and carbide bonds which stabilize an amorphous layer structure, resulting in smoother interfaces and an increased reflectivity. A near-normal incidence reflectivity of 11.7%, corresponding to a 67% increase, is achieved at λ = 3.11 nm upon adding 23 at.% (B + C). The advantage is significant for the multilayer periods larger than 1.8 nm, where amorphization results in smaller interface widths, for example, giving 36% reflectance and 99.89% degree of polarization near Brewster angle for a multilayer polarizer. The modulated ion-energy-assistance during the growth is considered vital to avoid intermixing during the interface formation even when B + C are added.
Authors:
 [1] ;  [1] ;  [2] ;  [3] ;  [4] ;  [1] ;  [1]
  1. Linkoping Univ. (Sweden). Dept. of Physics Chemistry and Biology
  2. SLAC National Accelerator Lab., Menlo Park, CA (United States)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
  4. Inst. for Nanometer Optics and Helmholtz-Zentrum Berlin for Materials and Energy (Germany)
Publication Date:
Grant/Contract Number:
AC02-76SF00515
Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 25; Journal Issue: 15; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Research Org:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE
OSTI Identifier:
1390702