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Title: Large area nanoimprint enables ultra-precise x-ray diffraction gratings

Authors:
; ;
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 25; Journal Issue: 19; Related Information: CHORUS Timestamp: 2017-09-14 12:09:56; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1390385