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Title: Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O 2 plasma jet

Authors:
; ; ;
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 35 Journal Issue: 5; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1377951

Luan, Pingshan, Knoll, Andrew J., Bruggeman, Peter J., and Oehrlein, Gottlieb S.. Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet. United States: N. p., Web. doi:10.1116/1.5000691.
Luan, Pingshan, Knoll, Andrew J., Bruggeman, Peter J., & Oehrlein, Gottlieb S.. Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet. United States. doi:10.1116/1.5000691.
Luan, Pingshan, Knoll, Andrew J., Bruggeman, Peter J., and Oehrlein, Gottlieb S.. 2017. "Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet". United States. doi:10.1116/1.5000691.
@article{osti_1377951,
title = {Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet},
author = {Luan, Pingshan and Knoll, Andrew J. and Bruggeman, Peter J. and Oehrlein, Gottlieb S.},
abstractNote = {},
doi = {10.1116/1.5000691},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 5,
volume = 35,
place = {United States},
year = {2017},
month = {8}
}