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This content will become publicly available on August 24, 2018

Title: A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge

Authors:
 [1] ;  [2] ;  [2] ;  [2] ; ORCiD logo [3]
  1. School of Physics, Dalian University of Technology, Dalian 116024, China, Department of Electrical Engineering and Computer Science-1770, University of California, Berkeley, California 94720, USA
  2. Department of Electrical Engineering and Computer Science-1770, University of California, Berkeley, California 94720, USA
  3. School of Physics, Dalian University of Technology, Dalian 116024, China
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 24; Journal Issue: 8; Related Information: CHORUS Timestamp: 2018-02-14 14:41:48; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1376737