Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry

Jellison, G. E.; Aytug, T.; Lupini, A. R.; Paranthaman, M. P.; Joshi, Pooran C.

doi:10.1016/j.tsf.2015.12.046

Title: Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry

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Abstract

Nanostructured glass films, which are fabricated using spinodally phase-separated low-alkali glasses, have several interesting and useful characteristics, including being robust, non-wetting and antireflective. Spectroscopic ellipsometry measurements have been performed on one such film and its optical properties were analyzed using a 5-layer structural model of the near-surface region. Since the glass and the film are transparent over the spectral region of the measurement, the Sellmeier model is used to parameterize the dispersion in the refractive index. To simulate the variation of the optical properties of the film over the spot size of the ellipsometer (~ 3 × 5 mm), the Sellmeier amplitude is convoluted using a Gaussian distribution. The transition layers between the ambient and the film and between the film and the substrate are modeled as graded layers, where the refractive index varies as a function of depth. These layers are modeled using a two-component Bruggeman effective medium approximation where the two components are the layer above and the layer below. Lastly, the fraction is continuous through the transition layer and is modelled using the incomplete beta function.

Authors:

Jellison, G. E. ^[1]; Aytug, T. ^[2]; Lupini, A. R. ^[3]; Paranthaman, M. P. ^[2]; Joshi, Pooran C. ^[3]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Chemical Sciences Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science & Technology Division

Publication Date:: Tue Dec 22 00:00:00 EST 2015

Research Org.:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1376293

Alternate Identifier(s):: OSTI ID: 1331840

Grant/Contract Number:: AC05-00OR22725

Resource Type:: Accepted Manuscript

Journal Name:: Thin Solid Films

Additional Journal Information:: Journal Volume: 617; Journal Issue: PA; Journal ID: ISSN 0040-6090

Publisher:: Elsevier

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; Spectroscopic ellipsometry; Nanostructured glass films; Bruggeman effective medium approximation; Incomplete beta function

Citation Formats


                    Jellison, G. E., Aytug, T., Lupini, A. R., Paranthaman, M. P., and Joshi, Pooran C. Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry.  United States: N. p., 2015. 
Web.  doi:10.1016/j.tsf.2015.12.046.

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                    Jellison, G. E., Aytug, T., Lupini, A. R., Paranthaman, M. P., & Joshi, Pooran C. Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry.  United States.  https://doi.org/10.1016/j.tsf.2015.12.046

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                    Jellison, G. E., Aytug, T., Lupini, A. R., Paranthaman, M. P., and Joshi, Pooran C. Tue .  
"Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry".  United States.  https://doi.org/10.1016/j.tsf.2015.12.046.  https://www.osti.gov/servlets/purl/1376293.

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@article{osti_1376293,

  title        = {Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry},

  author       = {Jellison, G. E. and Aytug, T. and Lupini, A. R. and Paranthaman, M. P. and Joshi, Pooran C.},

  abstractNote = {Nanostructured glass films, which are fabricated using spinodally phase-separated low-alkali glasses, have several interesting and useful characteristics, including being robust, non-wetting and antireflective. Spectroscopic ellipsometry measurements have been performed on one such film and its optical properties were analyzed using a 5-layer structural model of the near-surface region. Since the glass and the film are transparent over the spectral region of the measurement, the Sellmeier model is used to parameterize the dispersion in the refractive index. To simulate the variation of the optical properties of the film over the spot size of the ellipsometer (~ 3 × 5 mm), the Sellmeier amplitude is convoluted using a Gaussian distribution. The transition layers between the ambient and the film and between the film and the substrate are modeled as graded layers, where the refractive index varies as a function of depth. These layers are modeled using a two-component Bruggeman effective medium approximation where the two components are the layer above and the layer below. Lastly, the fraction is continuous through the transition layer and is modelled using the incomplete beta function.},

  doi          = {10.1016/j.tsf.2015.12.046},

  journal      = {Thin Solid Films},

  number       = PA,

  volume       = 617,

  place        = {United States},

  year         = {Tue Dec 22 00:00:00 EST 2015},

  month        = {Tue Dec 22 00:00:00 EST 2015}

}

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