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This content will become publicly available on August 21, 2018

Title: Power measurements and coupler optimization in inductive discharges

Authors:
ORCiD logo [1] ;  [2]
  1. Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109, USA and RF Plasma Consulting, Brookline, Massachusetts 02446, USA
  2. Plasma Sensors, Brookline, Massachusetts 02446, USA
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 88; Journal Issue: 8; Related Information: CHORUS Timestamp: 2018-02-14 12:32:37; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1375662