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Title: Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN / A l 0.72 S c 0.28 N multilayers

Authors:
; ; ; ;
Publication Date:
Type:
Published Article
Journal Name:
Physical Review Materials
Additional Journal Information:
Journal Name: Physical Review Materials Journal Volume: 1 Journal Issue: 3; Journal ID: ISSN 2475-9953
Publisher:
American Physical Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1375520

Garbrecht, Magnus, Hultman, Lars, Fawey, Mohammed H., Sands, Timothy D., and Saha, Bivas. Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN / A l 0.72 S c 0.28 N multilayers. United States: N. p., Web. doi:10.1103/PhysRevMaterials.1.033402.
Garbrecht, Magnus, Hultman, Lars, Fawey, Mohammed H., Sands, Timothy D., & Saha, Bivas. Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN / A l 0.72 S c 0.28 N multilayers. United States. doi:10.1103/PhysRevMaterials.1.033402.
Garbrecht, Magnus, Hultman, Lars, Fawey, Mohammed H., Sands, Timothy D., and Saha, Bivas. 2017. "Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN / A l 0.72 S c 0.28 N multilayers". United States. doi:10.1103/PhysRevMaterials.1.033402.
@article{osti_1375520,
title = {Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN / A l 0.72 S c 0.28 N multilayers},
author = {Garbrecht, Magnus and Hultman, Lars and Fawey, Mohammed H. and Sands, Timothy D. and Saha, Bivas},
abstractNote = {},
doi = {10.1103/PhysRevMaterials.1.033402},
journal = {Physical Review Materials},
number = 3,
volume = 1,
place = {United States},
year = {2017},
month = {8}
}