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Title: Direct observation of spoke evolution in magnetron sputtering

Authors:
ORCiD logo [1]; ORCiD logo [2]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  2. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Institute of High Energy Physics, Chinese Academy of Sciences, 19B Yuquan Road, Shijingshan District, Beijing 100049, China
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1374672
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 111 Journal Issue: 6; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Anders, André, and Yang, Yuchen. Direct observation of spoke evolution in magnetron sputtering. United States: N. p., 2017. Web. doi:10.1063/1.4994192.
Anders, André, & Yang, Yuchen. Direct observation of spoke evolution in magnetron sputtering. United States. doi:10.1063/1.4994192.
Anders, André, and Yang, Yuchen. Mon . "Direct observation of spoke evolution in magnetron sputtering". United States. doi:10.1063/1.4994192.
@article{osti_1374672,
title = {Direct observation of spoke evolution in magnetron sputtering},
author = {Anders, André and Yang, Yuchen},
abstractNote = {},
doi = {10.1063/1.4994192},
journal = {Applied Physics Letters},
number = 6,
volume = 111,
place = {United States},
year = {2017},
month = {8}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1063/1.4994192

Citation Metrics:
Cited by: 5 works
Citation information provided by
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Works referenced in this record:

Tutorial: Physics and modeling of Hall thrusters
journal, January 2017

  • Boeuf, Jean-Pierre
  • Journal of Applied Physics, Vol. 121, Issue 1
  • DOI: 10.1063/1.4972269

Plasma potential of a moving ionization zone in DC magnetron sputtering
journal, February 2017

  • Panjan, Matjaž; Anders, André
  • Journal of Applied Physics, Vol. 121, Issue 6
  • DOI: 10.1063/1.4974944

Sputtering process in the presence of plasma self-organization
journal, January 2017

  • Hecimovic, A.; Britun, N.; Konstantinidis, S.
  • Applied Physics Letters, Vol. 110, Issue 1
  • DOI: 10.1063/1.4973643

Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
journal, November 2016


Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas
journal, July 2013

  • Andersson, Joakim; Ni, Pavel; Anders, André
  • Applied Physics Letters, Vol. 103, Issue 5
  • DOI: 10.1063/1.4817257

Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering
journal, December 2014


Spoke rotation reversal in magnetron discharges of aluminium, chromium and titanium
journal, March 2016


Drifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents
journal, October 2014

  • Anders, Andre; Ni, Pavel; Andersson, Joakim
  • IEEE Transactions on Plasma Science, Vol. 42, Issue 10
  • DOI: 10.1109/TPS.2014.2334601

Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
journal, March 2012

  • Anders, André; Ni, Pavel; Rauch, Albert
  • Journal of Applied Physics, Vol. 111, Issue 5
  • DOI: 10.1063/1.3692978

Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas
journal, January 2016

  • Yang, Yuchen; Zhou, Xue; Liu, Jason X.
  • Applied Physics Letters, Vol. 108, Issue 3
  • DOI: 10.1063/1.4939922

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)
journal, March 2017

  • Anders, André
  • Journal of Applied Physics, Vol. 121, Issue 17
  • DOI: 10.1063/1.4978350

Non-uniform plasma distribution in dc magnetron sputtering: origin, shape and structuring of spokes
journal, October 2015

  • Panjan, Matjaž; Loquai, Simon; Klemberg-Sapieha, Jolanta Ewa
  • Plasma Sources Science and Technology, Vol. 24, Issue 6
  • DOI: 10.1088/0963-0252/24/6/065010

Self-organization and self-limitation in high power impulse magnetron sputtering
journal, May 2012


High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
journal, March 2012

  • Ehiasarian, A. P.; Hecimovic, A.; de los Arcos, T.
  • Applied Physics Letters, Vol. 100, Issue 11
  • DOI: 10.1063/1.3692172

Time- and Species-Resolved Plasma Imaging as a New Diagnostic Approach for HiPIMS Discharge Characterization
journal, November 2010

  • Hála, Matěj; Zabeida, O.; Baloukas, B.
  • IEEE Transactions on Plasma Science, Vol. 38, Issue 11
  • DOI: 10.1109/TPS.2010.2064183

Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering
journal, December 2014

  • Yang, Yuchen; Liu, Jason; Liu, Lin
  • Applied Physics Letters, Vol. 105, Issue 25
  • DOI: 10.1063/1.4905003