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Title: Direct observation of spoke evolution in magnetron sputtering

Authors:
ORCiD logo [1] ; ORCiD logo [2]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  2. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Institute of High Energy Physics, Chinese Academy of Sciences, 19B Yuquan Road, Shijingshan District, Beijing 100049, China
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 111 Journal Issue: 6; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1374672

Anders, André, and Yang, Yuchen. Direct observation of spoke evolution in magnetron sputtering. United States: N. p., Web. doi:10.1063/1.4994192.
Anders, André, & Yang, Yuchen. Direct observation of spoke evolution in magnetron sputtering. United States. doi:10.1063/1.4994192.
Anders, André, and Yang, Yuchen. 2017. "Direct observation of spoke evolution in magnetron sputtering". United States. doi:10.1063/1.4994192.
@article{osti_1374672,
title = {Direct observation of spoke evolution in magnetron sputtering},
author = {Anders, André and Yang, Yuchen},
abstractNote = {},
doi = {10.1063/1.4994192},
journal = {Applied Physics Letters},
number = 6,
volume = 111,
place = {United States},
year = {2017},
month = {8}
}